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Air ionizing apparatus and method
   
Document Number
US Patent 5847917
Issued Date
December 8, 1998
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Abstract
In an air ionizing apparatus of a type utilizing a sheath gas not containing water (hydrogen) or impurities to sheathe corona electrodes, sufficient amount of ions are generated to fully eliminate static electricity from the interior of a production environment such as a clean room and to prevent the impurities from depositing on the corona electrodes. The tips of corona electrodes 21a and 21b are positioned inwardly of the tips of sheath gas nozzles 4a and 4b, respectively, by a certain distance. The distance is so determined that for a sheath gas containing no negative gaseous molecules, electrons emitted by corona discharge can reach air existing outside the sheath gas nozzle 4b and that for a sheath gas containing the negative gaseous molecules, negative ions emitted by corona discharge can rapidly disperse into the air outside the sheath gas nozzle 4b without remaining in the interior of the nozzle 4b.
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Number of Claims:
18
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Owner
Published
December 8, 1998
Application Number
08/539,321
Filed
October 4, 1995
US Classification
361/213  
Int'l Classification
H05F   3/04   (20060101)   H05F   3/00   (20060101)  
Attorney/Law Firm
Priority Data
Jun 29, 1995 [JP] 7-163230
USPTO Field of Search
361/213   361/225   361/229   361/230   361/231  
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