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Measuring device and measuring method
 
   
Document Number
US Patent 5852238
Issued Date
December 22, 1998
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Abstract
A pulse-like heating is applied to a thin-film material having a high thermal conductivity such as a diamond thin film so that a response characteristic at this time is measured as a change in temperature of the thin film. The response characteristic reflects the thermal influence of the circumstance on the thin-film material, and depends, for example, on the flow rate of fluid. At this time, a sensor for obtaining an output depending on the fluid and the temperature of the fluid and a sensor for obtaining an output corresponding to the temperature of fluid are prepared to compare and process both the output with the result of obtaining an output which reflects the flow rate with accuracy not depending on the temperature.
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Number of Claims:
11
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Published
December 22, 1998
Application Number
08/343,969
Filed
November 18, 1994
US Classification
73/204.11  
Int'l Classification
G01N   27/18   (20060101)   G01F   1/684   (20060101)   G01N   27/14   (20060101)   G01N   33/00   (20060101)   G01F   1/692   (20060101)   G01F   1/696   (20060101)  
Assistant Examiner
Priority Data
Nov 26, 1993 [JP] 5-320936
USPTO Field of Search
73/204.16   73/204.24   73/204.25   73/204.26   73/202.5   73/204.19  
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Description
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