A method and apparatus for measuring particle motion using electromagnetic radiation uses beams of radiation modulated with a distinct frequency and/or phase. A particle traversing these beams scatters a portion of the radiation. Scattered radiation, which retains its modulation information, is then detected, and a cross-correlation technique is used to quantify the particle's motion, for example, particle velocity.

A method and apparatus for measuring particle motion using electromagnetic radiation uses beams of radiation modulated with a distinct frequency and/or phase. A particle traversing these beams scatters a portion of the radiation. Scattered radiation, which retains modulation information, is then detected, and a cross-correlation technique is used to quantify the particle's motion, for example, particle velocity.

The present invention provides apparatuses and methods for determining spatial information of a workpiece surface positioned in a predetermined coordinate system. Apparatuses and methods of the present invention can be used to determine one or more coordinates of one or more measurement locations of a workpiece within a predetermined coordinate system. Such coordinates can be used to define points, lines, and/or surfaces of the workpiece within the coordinate system. In one exemplary application, apparatuses and methods of the present invention can be used to determine spatial information of surfaces of head suspensions or head suspension assemblies such as those that are generally utilized in dynamic storage devices such as magnetic disk drives. Such spatial information can be used to determine z-height and/or static attitude, for example.

A three-axis, non-scanning, self-referenced laser air data sensing system comprises a support having three separate laser diodes providing beams of coherent light, which beams are directed toward separate beam expander mirrors. The expander mirrors reflect an expanding beam back toward a focusing mirror that focuses the beams along three diverging axes at known angles to each other at three separate locations in space. The focused beams form small detection cell regions through which particles in the fluid pass and reflect light. The reflected light is received back along the same paths as the transmission of the source light, and is directed back toward detectors on the base. The reflected light undergoes a Doppler shift, and this reflected light is combined with a reference signal tapped from one of the other of the three coherent light sources for heterodyning the signals for determining the Doppler shift and thus the relative velocity.

Frequency domain velocity measurements and time domain velocity measurements are made using light from cells or other objects. An optical grating is used to modulate the light from an object so that it has a frequency proportional to the velocity of the object. Depending upon the embodiment, the pitch of the optical grating is uniform or varying. The modulated light is detected and various signal processing techniques, such as a Fast Fourier Transform function, are used to indicate the velocity of the object. Preferably, the velocity measured is applied in determining a timing signal employed for synchronization of an image of the object and an detector signal in an optical analysis system that uses a time delay integration detector to determine characteristics of the object in response to light from the object.