A grounded insulated electrostatic supply tank comprised of a conductive tank that has several liners to fully insulate a waterborn fluid in the tank from ground. The interior of the tank and a sealed lid are coated with an insulating liner. An intermediate lining is placed in the tank and third interior insulating inner liner is inserted in the tank and has a lip that wraps around the upper rim of the tank and is sealed between the lid and the tank. Electrostatic spray equipment is connected to the tank by a coaxial hose having an inner non-conductive hose and preferably, an outer hose that is conductive. Inner non-conductive hose extends through the lid into an insulating teflon pick-up tube that extends to near the bottom of the tank. Depleted waterborn fluid in the tank is grounded after use by a manual probe or by a piston operated automatic grounding system.
An arrangement for improved thermal and/or electrical coupling between parts disposed in electronic device processing equipment is provided. In an illustrated embodiment, an improved coupling between a chamber liner and a chamber wall is provided which can be utilized in semiconductor processing equipment. The arrangement includes a compressible coupling or gasket which is compressed between a wedge ring and the chamber wall. The chamber liner is coupled to the wedge ring, so that the chamber liner is coupled to the chamber wall by way of the wedge ring and compressible coupling.
