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| United States Patent | 5883426 |
| Link to this page | http://www.wikipatents.com/5883426.html |
| Inventor(s) | Tokuno; Kenichi (Tokyo, JP);
Morisaki; Ikushi (Tokyo, JP);
Doya; Akihiro (Tokyo, JP);
Bonkohara; Manabu (Tokyo, JP);
Senba; Naoji (Tokyo, JP);
Shimada; Yuuzou (Tokyo, JP);
Utumi; Kazuaki (Tokyo, JP) |
| Abstract | A stack module is provided which relieves thermal stress generated in a
heat-radiating element and provides improved cooling efficiency.
Connection bumps of a plurality of mounting substrates, onto which are
mounted semiconductor chips are used to stack the substrates to four
levels, three wave-shaped heat-radiating elements, made of copper, being
in thermal contact between the semiconductor chips of three of the
mounting substrates and the rear surfaces of three of the mounting
substrates, making use of the spring elasticity of the heat-radiating
elements to establish this thermal contact. |
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Title Information  |
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| Publication Date |
March 16, 1999 |
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| Filing Date |
April 18, 1997 |
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| Priority Data |
Apr 18, 1996[JP]8-096410 |
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Title Information  |
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Description  |
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BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a stack module, and more specifically to a
stack module in which a plurality of substrates onto which are installed a
semiconductor chip are stacked.
2. Description of Related Art
FIG. 3 shows a cross sectional view of an example of a stack module in the
related art.
In the stack module which is shown FIG. 3, a heatsink 8 is adhered to the
top of (or the beneath of) a semiconductor chip 1 (or substrate 2), that
rests on (or beneath) the substrate 2, and four of these combinations
being stacked using a bump 6 for the purpose of connecting the substrate.
On the other hand, for example, in the Japanese Unexamined Patent
Publication (KOKAI) No. 5-190712, discloses a semiconductor device in
which a heatsink is directly connected to one main surface of a
semiconductor chip but this reference fails to show or suggest to stack a
plurality of this kind of semiconductor chips.
However, there is a drawback in the above-described stack module, because
of the difference in coefficient of thermal expansion between the
semiconductor chip (or substrate) and the heatsink, which causes thermal
stress to develop at the above-noted adhered part, thereby shortening the
thermal-cycle life.
Additionally, because the heatsink is a flat plate and has a small
heat-radiating surface area, to increase the cooling effect, it is
necessary to extend the heatsink to outside the bounds of the substrate,
this making it difficult to achieve a compact stack module.
In view of the above-noted drawbacks in this related art, an object of the
present invention is to provide a stack module which enables efficient
cooling without the generation of thermal stress therewithin, thereby
enabling long life of the stacked module.
SUMMARY OF THE INVENTION
To achieve the above-noted object of the present invention, a first aspect
of the present invention has basically a following technical construction
in that a stack module comprising a plurality of substrates on a main
surface of which at least one semiconductor chip is mounted, and each one
of the substrates being stacked each other, one by one, the stack module
being provided with a wave-shaped heat-radiating element disposed between
the semiconductor chip and an adjacent substrate arranged opposite to a
surface of the semiconductor chip so that the heat-radiating element
contacts both the surface of the semiconductor chip and the opposite
surface of the adjacent substrate to the semiconductor chip.
And a second aspect of the present invention has basically a following
technical construction in that a stack module comprising a plurality of
substrates on a main surface of which at least one semiconductor chip is
mounted, and each one of the substrates being stacked each other, one by
one, the stack module being provided with a heat pipe element disposed
between the semiconductor chip and an adjacent substrate arranged opposite
to a surface of the semiconductor chip so that the heat pipe element
contacts both the surface of the semiconductor chip and the opposite
surface of the adjacent substrate to the semiconductor chip.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a cross-sectional view which shows the first embodiment of a
stack module in the present invention.
FIG. 2 is a cross-sectional view which shows the second embodiment of a
stack module in the present invention.
FIG. 3 is a cross-sectional view which shows an example of the related art.
FIG. 4 is a schematic view of a third embodiment of the stacked module in
the present invention.
FIGS. 5(A), 5(B), 6(A) and 6(B) show practical embodiments of the present
invention.
DETAILED DESCRIPTION OF THE INVENTION
The embodiments of the stack module of the present invention will be
described below with reference being made to FIGS. 1, 2 and 4.
FIG. 1 shows a cross-sectional view of a first embodiment of the stack
module of the present invention, and in FIG. 1, it is disclosed that a
stack module 10 comprising a plurality of substrates 2a to 2d on a main
surface of which at least one semiconductor chip 1 is mounted, and each
one of the substrates 2a to 2d being stacked each other, one by one, and
the stack module 10 being provided with a wave-shaped heat-radiating
element 5a to 5c disposed between the semiconductor chip 1 and an adjacent
substrate 2a, 2b, 2c or 2d arranged opposite to a surface of the
semiconductor chip 1 so that the heat-radiating element 5a to 5c contacts
both the surface of the semiconductor chip 1 and the opposite surface of
the adjacent substrate 2a, 2b, 2c or 2d to the semiconductor chip 1.
Note that the characteristic technical feature of the first embodiment of
the present invention is such that the stack module 10 has a wave-shaped
heat-radiating element 5a, 5b, and 5c, between a semiconductor chip 1
which is flip-chip mounted on a substrate 2a, 2b, 2c or 2d and the
adjacent substrate 2a, 2b, 2c or 2d.
In the stack module 10 which is shown FIG. 1, connection bumps 6 of
mounting substrates 2a through 2d, onto which are mounted semiconductor
chips 1 are used to stack the substrates to four levels, wave-shaped
heat-radiating elements 5a through 5c, made of copper, being in thermal
contact between the semiconductor chips 1 of the mounting substrates 2b
through 2d and the rear surfaces of the mounting substrates 2a through 2c,
making use of the spring elasticity of the radiating elements to establish
this thermal contact.
In the present invention, when the above-mentioned stack module 10 is
formed, currently used soldering materials can be used for the connection
bumps 6 and further a conductive metal, for example, copper balls, can be
used accompanied by the soldering material as a core component.
The heat-radiating elements 5a through 5c, having a large heat-radiating
surface area, have a large cooling effect and, because the heat-radiating
elements 5a through 5c are not adhesively attached to any point, thermal
stress is not generated.
In the first embodiment of the present invention, the semiconductor chip 1
can be mounted on one main surface of the mounting substrate 2a to 2d,
utilizing any kinds of chip mounting method as currently known but the
semiconductor chip 1 is preferably mounted on the substrate in a flip-chip
mounting manner.
Further in the embodiment of the stack module of the present invention, the
heat-radiating element 5a through 5c, are preferably have wave-like shape,
as shown in FIG. 1, and moreover, in the present invention, it is very
important that the wave-like shaped heat-radiating element 5a through 5c,
should be directly connected to both the surface of the semiconductor chip
1 and the opposite surface of the substrate 2 to the chip 1 and the
substrate 2, which is adjacently arranged to the chip.
Note that, in the present invention, the heat-radiating element 5a through
5c, have a large heat-radiating surface area, and thus they have a large
cooling effect and, because the heat-radiating elements 5a through 5c are
not adhesively attached to any point, thermal stress is not generated.
Further note that in the present invention, the heat-radiating element 5a
through 5c, have a cushion effect so that even if the stack module was
suffered from some physical stress including a thermal stress or the like,
the heat-radiating element 5a through 5c can absorb such stress.
Moreover, in the present invention, the heat radiating effect will be much
more improved since the heat-radiating element 5a through 5c, not only
have relatively large surfaces, respectively, but also are connected to
the oppositely arranged neighboured substrate so that the heat radiating
operation can also additionally attained through the heat-radiating
element 5a through 5c, and the substrate.
FIG. 4 shows another embodiment of the stack module in the present
invention.
As shown in FIG. 4, the embodiment of the stack module comprises a
plurality of stack modules 10-1, 10-2 and 10-3 mounted on a suitable
substrate 50 which is a bottom portion of a hermetically sealed chamber
30, except for a rear end thereof.
Additionally, the chamber 30 is provided with a fan 40 driven by any
suitable electrical motor or the like and which provides positive air flow
into this chamber 30 through a suitable duct 45 so as to pass the air flow
through each one of the heat-radiating element 5a through 5c of each one
of the stack modules 10-1, 10-2 and 10-3 to thereby cool the
heat-radiating element 5a through 5c, more effectively.
In the present invention, the heat-radiating element 5a through 5c is
preferably made of copper.
FIGS. 5(A) and 5(B) shows an one practical embodiment of the first aspect
of the present invention and in that some dimensions of the stack module
thereof are disclosed.
Next, the stack module of the second aspect of the present invention will
be explained hereunder with reference to FIG. 2.
FIG. 2 is a cross-sectional view of the second embodiment of the present
invention and in that it is disclosed that a stack module 10 comprising a
plurality of substrates 2 on a main surface of which at least one
semiconductor chip 1 is mounted, and each one of the substrates 2 being
stacked each other, one by one, the stack module 10 being provided with a
heat pipe element 7a to 7c disposed between the semiconductor chip 1 and
an adjacent substrate 2 arranged opposite to a surface of the
semiconductor chip 1 so that the heat pipe element 7 contacts both the
surface of the semiconductor chip 1 and the opposite surface of the
adjacent substrate 2 to the semiconductor chip 1.
Note that in the stack module 10 which is shown in FIG. 2, heat pipes 7a
through 7c are utilized in place of the heat-radiating elements 5a through
5c which are shown in FIG. 1.
Heat which is generated from the semiconductor chips 1 vaporizes the
solvent of the heat pipes 7a through 7c, cooling being performed by the
associated heat of vaporization, thus enabling efficient cooling in an
environment in which air cooling is difficult, such as in a vacuum.
Regarding the heat pipe elements 7, any kinds of currently used heat pipe
elements, for example, "Micro heat-Pipe" produced by Furukawa Denko Co.,
Ltd., can be used in the present invention.
FIGS. 6(A) and 6(B) shows an one practical embodiment of the second aspect
of the present invention and in that some dimensions of the stack module
thereof are disclosed.
A second embodiment of the present invention is a stack module which has a
heat pipe between a semiconductor chip which is flip-chip mounted on a
substrate and the adjacent substrate.
Using the stack module having the technical constitution described above
because a wave-shaped heat-radiating element or a heat pipe is used in
place of a flat plate attached by adhesion to make contact with the
location that generates heat, it is possible to achieve a long thermal
cycle life without the generation of thermal stress.
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Description  |
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