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Method of producing high surface area metal oxynitrides as substrates in electrical energy storage
   
Document Number
US Patent 5980977
Issued Date
November 9, 1999
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Abstract
The present invention concerns a process to produce a high surface area niobium oxynitride, tantalum oxynitride, vanadium oxynitride, zirconium oxynitride, titanium oxynitride or molybdenum oxynitride coated substrate for use as an electrical energy storage component in a capacitor or a battery configuration. The process relates to: (a) coating one or both flat etched surfaces of a solid substrate, in the form of a thin sheet, with a solution or a slurry of a metal halide in a liquid volatile carrier to produce a thin surface film; (b) contacting the metal halide surface film-carrier coated substrate of step (a) with oxygen, air, or combinations thereof at a temperature to convert the metal halide to metal oxide, respectively, as a thin film and to remove the liquid volatile carrier; (c) repeating steps (a) and (b) to obtain a desired thickness; (d) heating the metal oxide film coated substrate of step (c) in oxygen, air or combinations thereof to convert at least about 95% of the metal chloride to metal oxide; (e) increasing the temperature of the metal oxide coated substrate to elevated temperatures; (f) contacting the oxide coated substrate produced in step (e) with a nitrogen source selected from excess flowing gaseous ammonia, a mixture of ammonia gas and hydrogen gas, or a mixture of hydrogen gas and nitrogen gas at elevated temperatures to convert about 95% or greater of the oxide coating to the corresponding metal oxynitride on the substrate, which metal oxynitride layer has a high surface area and is electrically conductive; and (g) cooling to ambient temperature and recovering the high surface area metal oxynitride coated substrate produced in step (f).
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Method of producing high surface area metal oxynitrides as substrates in electrical energy storage - US Patent 5980977 Drawing
Drawing from US Patent 5980977
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Number of Claims:
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Owner
Published
November 9, 1999
Application Number
08/761,837
Filed
December 9, 1996
US Classification
427/79   427/376.2 427/377 427/419.3
Int'l Classification
H01G   9/00   (20060101)   H01M   4/58   (20060101)   H01M   4/00   (20060101)   H01M   4/04   (20060101)   H01G   9/04   (20060101)   H01M   10/04   (20060101)   H01M   6/48   (20060101)   H01M   6/42   (20060101)   H01M   2/00   (20060101)   H01M   2/36   (20060101)  
Examiner
Parent Case
CROSS REFERENCE TO RELATED APPLICATIONS This application is a continuation-in-part of U.S. Ser. No. 08/727,821, filed Sep. 30, 1996 now abandoned, which is a continuation-in-part of U.S. Ser. No. 08/219,965, filed Mar. 30, 1994 now U.S. Pat. No. 5,867,363, which claims priority on U.S. Philippine Serial No. 93/5773, filed Sep. 20, 1993 and which is also a continuation-in-part of U.S. Ser. No. 07/947,414, filed Sep. 18, 1992, now U.S. Pat. No. 5,384,685, U.S. Ser. No. 07/947,294, filed Sep. 18, 1992, now U.S. Pat. No. 5,464,453, and U.S. Ser. No. 07/958,506, filed Oct. 7, 1992, now abandoned. It is also a continuation-in-part of and claims priority on PCT/US95/03985, filed Mar. 30, 1995, which claims priority on U.S. Ser. No. 08/219,965, filed Mar. 30, 1994 now U.S. Pat. No. 5,867,363 and U.S. Ser. No. 08/377,121, filed Jan. 23, 1995 now U.S. Pat. No. 5,711,988.
USPTO Field of Search
427/79   427/376.2   427/377   427/419.3  
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