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Optical vibration measurement system
   
Document Number
US Patent 5991027
Issued Date
November 23, 1999
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Inventors
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Abstract
A measuring apparatus comprises a sensor having a vibrating beam whose resonant frequency represents a parameter, such as pressure, to be measured. A light guide supplies light from a source to the beam and returns light reflected from the beam and from the end of the guide to an interferometer. The difference in light paths is greater than the coherent length of the light. The interferometer has first and second paths which differ in length by the difference in the light paths plus an odd number of quarter wavelengths of the light.
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Number of Claims:
4
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Published
November 23, 1999
Application Number
09/035,242
Filed
March 5, 1998
US Classification
356/481   356/519
Int'l Classification
G01L   9/00   (20060101)  
Examiner
Parent Case
This a continuation of application Ser. No. 08/835/810, filed Apr. 16, 1997, now abandoned, which is a continuation of application Ser. No. 08/610,386, filed Mar. 4, 1996, now abandoned.
Priority Data
Mar 18, 1995 [GB] 9505516
USPTO Field of Search
356/345   356/352  
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Claims
Description
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