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Complex dielectric film and semiconductor device
   
Document Number
US Patent 5998823
Issued Date
December 7, 1999
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Abstract
A complex dielectric film formed as an insulation film between oppositely facing conductors is made of an insulator and a non-insulator. The insulator and the non-insulator are formed to align in series in a serial model, to contain the non-insulator in the insulator in a serial-parallel model, and to align in parallel in a parallel mode 1. The insulator may be SiO.sub.2, Si.sub.3 N.sub.4, or other like material, and the non-insulator may be a metal, semi-metal, semiconductor containing conduction electrons, organic material containing conduction electrons, or other like material. The volume ratio of the non-insulator is chosen to an appropriate value in accordance with the designed value of the effective dielectric constant.
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Number of Claims:
40
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Owner
Sony Corporation (Tokyo,JP)
Published
December 7, 1999
Application Number
08/868,965
Filed
June 5, 1997
US Classification
257/306   257/310 257/E21.267 257/E21.576 257/E23.167
Int'l Classification
H01L   21/70   (20060101)   H01L   23/532   (20060101)   H01L   21/768   (20060101)   H01L   23/52   (20060101)   H01L   21/314   (20060101)   H01L   21/02   (20060101)  
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Priority Data
Jun 06, 1996 [JP] 8-166889
USPTO Field of Search
257/306   257/310   257/38   257/22  
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