The present invention is an optical system for profiling a surface of an object. The optical system includes a projection system for directing an incident beam of light having a varying intensity pattern onto the surface of the object. The projection system includes a filter or the like for reducing or attenuating high order harmonics from the varying intensity pattern. The varying intensity pattern of the incident light beam is spatially shifted N times, where N is greater than 2. A detector array is arranged relative to the surface of the object to receive a reflected deformed grating image of the surface. A processing system, coupled to the detector array, determines a surface profile of the object based on a number of the deformed grating image at different spatial phases.
A range finder device, for measuring, when a plurality of projected lights having radiation patterns whose light intensity differs three-dimensional space-wise are irradiated onto an object from a light source on a time-sharing basis to image-pick up reflected light of the projected light from the object with a camera, a distance using the light intensity of an image picked up, characterized in that, with respect to each of a plurality of surfaces including the center of the light source and the center of a lens, there is obtained, in advance, relation between an angle of each projected light from the light source and light intensity ratio in each surface, characterized in that, at the time of actual distance measurement, light intensity of each pixel of the camera is measured, and on the basis of the light intensity thus measured, and relation between the angle and the light intensity ratio on a predetermined surface corresponding to a coordinate position of the pixel measured, there is obtained the angle corresponding to the light intensity of the predetermined pixel thus measured, and characterized in that, on the basis of these light intensity measured, the angles obtained and further two-dimensional coordinate position information on the predetermined pixel on the image, a distance to the object is calculated.
A range finder device, for measuring, when a plurality of projected lights having radiation patterns whose light intensity differs three-dimensional space-wise are irradiated onto an object from a light source on a time-sharing basis to image-pick up reflected light of the projected light from the object with a camera, a distance using the light intensity of an image picked up, characterized in that, with respect to each of a plurality of surfaces including the center of the light source and the center of a lens, there is obtained, in advance, relation between an angle of each projected light from the light source and light intensity ratio in each surface, characterized in that, at the time of actual distance measurement, light intensity of each pixel of the camera is measured, and on the basis of the light intensity thus measured, and relation between the angle and the light intensity ratio on a predetermined surface corresponding to a coordinate position of the pixel measured, there is obtained the angle corresponding to the light intensity of the predetermined pixel thus measured, and characterized in that, on the basis of these light intensity measured, the angles obtained and further two-dimensional coordinate position information on the predetermined pixel on the image, a distance to the object is calculated.
A shadow-free 3D and 2D measurement system combining, in one FMI set-up, a Moire 3D lighting with other simultaneous external illuminations (for example a coaxial one or another). The reconstructed image combines the advantages of these different illuminations. The relative light intensities are selected in order to assure the best 2D detection while maintaining the 3D measurements.
A miniature three-dimensional contour scanner is provided, which integrates the optical element and the set of optical lens of the optical projection module and the image capture module into a miniature measurement device. The device utilizes the optical fiber to guide in the light of outside light source and applies the digital micromirror device (DMD) chip to produce structured light pattern and project it onto the object's surface to be measured. The image sensor element is then used to capture the deformed structured fringe image, and by utilizing this information it is able to obtain the colored two-dimensional image and the three-dimensional contour size of the object. The miniature three-dimensional contour scanner can thus be applied in the measurement of miniature objects in the narrow space.
For measuring the three-dimensional shape of an object of measurement using a phase shift method, a three-dimensional shortening the measurement time. A printed state inspection device 1 includes a printed circuit board K printed with cream solder H, an illumination device 3 for illuminating three sine wave light component patterns with different phases on the surface of printed circuit board K, and a CCD camera 4 for picking-up images of the illuminated part of the printed circuit board K. A control device 7 creates a chart representing a relationship between brightness and coordinates for each light component from the image data obtained by the illumination of the light component patterns and determines relative phase angles among the light component patterns, and calculates the height of the cream solder H from the image data and the relative phase angles.