In a measuring method with a probe (a touch trigger probe 70), a velocity V1 and a coordinate value P1 of the prove trigger probe 70 are detected when a contact-detection signal is generated from the probe 70, and then a coordinate value P0 at the moment of contact is found from the coordinate value P1, the velocity V1, and an elapsed time T1 of the touch trigger prove 70 since the contact detection (an elapsed time from the contact until the contact-detection signal is generated).
A contact location detecting mechanism (1) of a touch signal probe (10) includes a rotary motion generator (30) for scanningly moving a stylus (102) on a plane (A), a phase value detector (50) for detecting a phase value (.theta.) indicating a rotation position of the scanning rotary motion, and a contact location detector (70)for detecting a contact location of a contact portion (102A) based on a detection signal value (V) detected by the detector (103B) and the phase value (.theta.). Since the contact location of the contact portion (102A) can be detected by the contact location detector (70), the touch signal probe (10) can be used for a profiling measurement and continuous measurement of a workpiece.
The invention relates to a method for detecting measurement data on coordinate measuring and digitalizing machines. When the measuring times of the coordinate measuring machine and the sensor are determined by an electric signal (trigger), the equality thereof can be guaranteed and the influence of signal propagation delays can be excluded. The nth sensor information always corresponds to the nth machine information. Allocation is made easier when each value detected at a measuring time obtains an identifier. In one embodiment, surface points of a free forming surface can be detected during movement of the sensor on the coordinate measuring machine and by means of a measuring sensor. The measuring times are determined by an electric signal that is produced by the sensor and is transmitted to the coordinate measuring machine. The signal triggers distance measuring of the sensor as well as the output of the current machine position.
A fine feed mechanism (50) and a coarse feed mechanism (60) respectively for minutely and greatly displacing a stylus (12) is provided to a microscopic geometry measuring device (1), so that the respective mechanisms (50, 60) are combinedly actuated for easily controlling the movement of the stylus (12) in a wide range at a short time. Further, a movable balancing portion (53) moving in a direction opposite to a movable driving portion (52) is provided to the fine feed mechanism (50). Since a reaction force caused by the movement of the movable driving portion (52) is cancelled by another reaction force caused by the movement of the movable balancing portion (53) at a fixed portion (51), no mechanical interference is caused between the respective mechanisms (50, 60), thus accurately controlling the movement of the stylus (12).
An arithmetic unit 212 is a correction filter 212a based on the relative displacement characteristics between a scale unit 19b and the end of a slider 16, and calculates a measured value by adding up together the displacement of the stylus tip 17a and a value found by applying the correction filter 212a to the displacement of the slider 16 detected by the scale unit 19b.
By combining measuring element direction constant control, rotary table radius constant scanning control, and two-flank contact control, V-groove rotary table scanning control is performed to cause the measuring element of the scanning probe to contact always with two flanks composing the V-groove of the object to be measured, so that it is possible to measure accurately the characteristic values such as pitch deviation and axial runout of side face of male threads set up and fixed on a rotary table or screw hole of the object put on the rotary table.
