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Diode formed in a surface silicon layer on an SOI substrate
   
Document Number
US Patent 6051874
Issued Date
April 18, 2000
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Abstract
A diode is formed by forming a PN junction region 6 with a p region 5 formed on a buried oxide film 19 side and an n region 7 formed on the surface side in a surface silicon layer 3 which is isolated by the buried oxide film 19 of an SOI substrate 1, providing a lightly doped p region 33 on one end side of the PN junction region 6 and a lightly doped n region 31 on an other end side, forming a heavily doped p region 13 and a heavily doped n region 9 at the respective surface portions of the lightly doped p region 33 and the lightly doped n region 31 in such a manner as not to contact the PN junction region 6, and providing two metal plates which respectively connect to the heavily doped p region 13 and the heavily doped n region 9.
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Diode formed in a surface silicon layer on an SOI substrate - US Patent 6051874 Drawing
Drawing from US Patent 6051874
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Number of Claims:
6
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Owner
Published
April 18, 2000
Application Number
09/280,689
Filed
March 30, 1999
US Classification
257/594   257/507 257/653 257/E29.327
Int'l Classification
H01L   29/861   (20060101)   H01L   29/66   (20060101)  
Examiner
Priority Data
Apr 01, 1998 [JP] 10-88522
USPTO Field of Search
257/507   257/594   257/653  
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