This patent describes a method of manufacturing a paddle type ink jet print head wherein an array of nozzles are formed on a substrate utilizing planar monolithic deposition, lithographic and etching processes. Multiple ink jet heads are formed simultaneously on a single planar substrate such as a silicon wafer. The print heads can be formed utilizing standard VLSI/ULSI processing and can include integrated drive electronics formed on the same substrate. The drive electronics preferably are of a CMOS type. In the final construction, ink can be ejected from the substrate substantially normal to the substrate plane.
CROSS REFERENCES TO RELATED APPLICATIONS
The following co-pending U.S. patent applications, identified by their U.S. patent application Ser. Nos. (USSN), were filed simultaneously to the present application on Jul. 10, 1998, and are hereby incorporated by cross-reference.
The nozzle chamber of an inkjet print head of the type having a paddle moving within the chamber, is provided with sloping side walls arranged such that the gap between the periphery of the paddle and the chamber walls increases from the quiescent to the forming position. This facilitates rapid refilling of the chamber after firing and higher speed of operation.
A liquid discharge head includes a pair of substrates mutually fixed in lamination, a plurality of liquid flow paths arranged on the bonded faces of the substrates, the leading end of the plural liquid flow paths being communicated with a plurality of discharge ports, a plurality of heat generating members arranged on at least one of the substrates corresponding to each of the liquid flow paths and a movable member having in the liquid flow path the free end thereof on the discharge port side, and a region between the heat generating member and the movable member, where liquid exists. In the liquid discharge head, a bubble is created by enabling thermal energy generated by the heat generating members to act upon the liquid, and the bubble is controlled by the movable member to discharge liquid in the liquid flow paths from the discharge ports to the outside. Further, all of the movable members, members becoming side walls of liquid flow paths, members supporting the movable members, and members supporting the walls of liquid flow paths are formed by materials containing silicon and the side walls of liquid flow paths are formed by patterning the material containing silicon formed on the surface of one of the pair of substrates in the liquid discharge head.
An improved magnetostrictive actuator is provided. The actuator includes combinations of magnetostrictive alloy compositions and prestress values to provide improved temperature response for automotive applications, such as fuel injectors, without the need for complex electronic controls.
A printhead having a monolithic semiconductor body with an upper face and a lower face. The body defines a fluid path including a pumping chamber, a nozzle flow path, and a nozzle opening. The nozzle opening is defined in the lower face of the body and the nozzle flow path includes an accelerator region. A piezoelectric actuator is associated with the pumping chamber. The actuator includes a piezoelectric layer having a thickness of about 50 micron or less.
Ink jet printheads and printhead components are described. One printhead includes a flow path and a piezoelectric actuator. The flow path includes a pumping region and the piezoelectric actuator is associated with the pumping region. The actuator has a pre-fired piezoelectric layer with a thickness of about 50 microns or less. A bonding layer fixes the pre-fired piezoelectric layer relative to the flow path.
