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Semiconductor device and its manufacturing method
   
Document Number
US Patent 6114730
Issued Date
September 5, 2000
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Abstract
Prevents deterioration of the element characteristics of the gate voltage tolerance and the like which is caused by the metallic contaminants that are sealed in the element forming region at the time of applying a trench separator in a SOI substrate. Polysilicon 12 is formed on the side walls of the trench 5, and the metallic contaminants within the element forming region are collected in this polysilicon 12.
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Number of Claims:
8
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Published
September 5, 2000
Application Number
09/079,533
Filed
May 15, 1998
US Classification
257/353   257/347 257/354 257/505 257/508 257/513 257/520 257/554 257/E21.32 257/E21.426 257/E21.427 257/E21.433 257/E21.564 257/E29.135 257/E29.136 257/E29.268
Int'l Classification
H01L   29/66   (20060101)   H01L   21/762   (20060101)   H01L   29/423   (20060101)   H01L   29/40   (20060101)   H01L   21/336   (20060101)   H01L   21/02   (20060101)   H01L   21/70   (20060101)   H01L   21/322   (20060101)   H01L   29/78   (20060101)  
Examiner
Assistant Examiner
USPTO Field of Search
257/353   257/354   257/505   257/513   257/347   257/520   257/508   257/554  
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