Interconnect for semiconductor components and method of fabrication

Claims

What is claimed is:

1. A method for fabricating an interconnect for a semiconductor component having a contact comprising:

providing a substrate;

providing a resist configured to form features with an aspect ratio (height/width) of at least 10;

depositing the resist on the substrate to form a polymer layer;

exposing, etching, and curing the polymer layer to form a raised contact member on the substrate; and

forming a conductive layer on the contact member configured to electrically engage the contact on the component.

2. The method of claim 1 wherein a height of the polymer layer and the contact member is about 3 mils to 10 mils.

3. The method of claim 1 wherein the resist comprises an epoxy, a solvent and a photoinitiator.

4. The method of claim 1 further comprising forming a projection in the polymer layer prior to etching such that the contact member includes the projection for penetrating the contact on the component.

5. A method for fabricating an interconnect for a semiconductor component having a bumped contact comprising:

providing a substrate;

providing a resist configured to form features with an aspect ratio (height/width) of at least 10;

depositing the resist on the substrate to form a polymer layer;

exposing and etching the polymer layer to form an indentation configured to retain the bumped contact on the component;

curing the polymer layer; and

depositing a conductive layer in the indentations.

6. The method of claim 5 wherein the indentation has a death of about 1-5 mils.

7. The method of claim 5 wherein the resist comprises an epoxy, a solvent and a photoinitiator.

8. The method of claim 5 further comprising forming at least one projection in the indentation for penetrating the bumped contact on the component by exposing and etching the polymer layer.

9. A method for fabricating an interconnect for a semiconductor component having a plurality of contacts comprising:

providing a substrate;

providing a resist configured to form features having an aspect ratio (height/width) of at least 10;

depositing the resist on the substrate to form a resist layer with a thickness of about 3 to 10 mils;

exposing the resist layer through openings in a reticle;

etching the resist layer to remove either exposed or unexposed portion of the resist layer to form a plurality of raised contact members corresponding to a pattern of the contacts on the component and having a height corresponding to the thickness; and

forming a conductive layer on each contact member.

10. The method of claim 9 wherein the resist comprises an epoxy, a solvent and a photoinitiator.

11. The method of claim 9 wherein forming the conductive layer comprises an electroless or electrochemical deposition process.

12. The method of claim 9 further comprising forming an insulating layer on the substrate prior to the depositing step and endpointing the etching step on the insulating layer.

13. A method for fabricating an interconnect for a semiconductor component having a bumped contact comprising:

providing a substrate;

providing a resist configured to form features having an aspect ratio (height/width) of at least 10;

depositing the resist on the substrate to form a resist layer;

etching the resist layer to form an indentation therein configured to retain the bumped contact and having a depth of about 1-5 mils;

depositing a conductive layer within the indentation configured to electrically engage the bumped contact; and

forming a conductor on the substrate in electrical communication with the conductive layer.

14. The method of claim 13 wherein the resist comprises an epoxy, a solvent and a photoinitiator.

15. The method of claim 13 wherein the substrate comprises a material selected from the group consisting of ceramic, mullite and silicon.

16. The method of claim 13 wherein the conductive layer comprises a material selected from the group consisting of nickel, palladium and platinum.

17. A method for fabricating an interconnect for a semiconductor component having a contact comprising:

providing a substrate;

providing a resist comprising epoxy and a photoinitiator;

depositing the resist on the substrate to form a resist layer having a thickness;

exposing the resist layer through a reticle;

etching the resist layer to form a contact member on the substrate having a height equal to the thickness; and

depositing a conductive layer on the contact member configured to electrically engage the contact on the component.

18. The method of claim 17 further comprising forming an insulating layer on the substrate and endpointing the etching step on the insulating layer.

19. The method of claim 17 further comprising forming a projection in the resist layer prior to the etching step such that the contact member includes the projection for penetrating the contact on the component.

20. A method for fabricating an interconnect for a semiconductor component having a bumped contact comprising:

providing a substrate;

providing a resist comprising epoxy and a photoinitiator;

depositing the resist on the substrate to form a resist layer;

exposing the resist layer through a reticle;

etching the resist layer to form an indentation therein sized to retain the bumped contact on the component and a projection in the indentation configured to penetrate the bumped contact; and

depositing a conductive layer in the indentation conzfigured to electrically engage the bumped contact.

21. The method of claim 20 wherein the resist is formulated to form features having an aspect ratio (height/width) of at least 10.