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Grindstone having a vacuum system in a pin chuck stepper
   
Document Number
US Patent 6176770
Issued Date
January 23, 2001
Link
Inventors
Kao; Chung-Hsien (Yunlin Hsien,TW)
Cheng; Patrick (Kaoshiung Hsien,TW)
Lee; Li-Chung (Ilan Hsien,TW)
Chen; Mei-Ling (Hsinchu Hsien,TW)
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Abstract
A grindstone having a vacuum system is applied to a pin chuck stepper. The vacuum system has a vacuum tube attached on the edge of the grindstone. When the grindstone moves on a pin chuck stage on the pin chuck stepper, the vacuum tube vacuums the pin chuck stage to free particles on the pin chuck stage.
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Grindstone having a vacuum system in a pin chuck stepper - US Patent 6176770 Drawing
Drawing from US Patent 6176770
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Number of Claims:
4
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Published
January 23, 2001
Application Number
09/494,522
Filed
January 31, 2000
US Classification
451/456   451/388
Int'l Classification
B24B   55/00   (20060101)   B24B   55/10   (20060101)   B24D   15/00   (20060101)   B24D   15/02   (20060101)   G03F   7/20   (20060101)  
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USPTO Field of Search
451/456   451/388   451/354   451/164  
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