A material handling device comprising first and second upper arm members having respective proximal and distal end portions and first and second forearm members having respective proximal and distal end portions. The proximal end portions of the first and second forearm members are pivotally coupled to the distal end portions of the respective first and second upper arm members by respective first and first and second pivot assemblies. The distal end portions of the first and second forearm members are attached together. A material handler is carried by the distal end portions of the first and second forearm members. The first and second forearm members have a retracted position in which the first and second forearm members extend linearly along an imaginary line passing through the first and second pivot assemblies with the distal end portions of the first and second forearm members being disposed approximately midway between the first and second pivot assemblies. A motor assembly is coupled to the first and second upper arm members for moving the distal end portions of the first and second forearm members in a first direction along a second imaginary line extending perpendicularly of the first imaginary line to a first extended position and in an opposite second direction along the second imaginary line to a second extended position. The distal end portions of the first and second forearm members pass through the retracted position when traveling from the first extended position to the second extended position.
A transfer system used in transferring a semiconductor from one process to another process during manufacture, and comprising first and second upper arms and first and second forearms assembled to form a frog-legs like structure, with the first and second forearms being linked to a forearm link, and a transfer hand attached to the forearm link; wherein the transfer hand is moved by associating the first upper arm motion with the first and second forearm motions, and by associating the second upper arm motion with the first and second forearm motions.
With a rail which is used by both a linear conveyor vehicle and a track guided vehicle, the traveling loops 2,3, the short-cuts 4.about.7 and the access routes 8.about.11 are provided. The traveling loops 20.about.25 are arranged in a rail for a track guided vehicle, and are connected to the traveling loops 2,3 at the diverging/converging point 30. A linear conveyor vehicle system and a track guided vehicle system are integrated to convey articles efficiently.
A robotic semiconductor handling system includes two robot arms for transferring substrates between processing, cooling, and storage stations. The first robot arm has a paddle-type end effector adapted such that it can support one substrate at a primary location as well as a second substrate at a secondary staging location. The second robot arm is a Bernoulli-style wand that transfers a substrate from the primary location to the secondary one, and transfers substrates from either location to the process chamber. The use of the dual-location paddle allows for a significant reduction in cycle-time over a single paddle location and a Bernoulli wand system.
A robotic semiconductor handling system includes two robot arms for transferring substrates between processing, cooling, and storage stations. The first robot arm has a paddle-type end effector adapted such that it can support one substrate at a primary location as well as a second substrate at a secondary staging location. The second robot arm is a Bernoulli-style wand that transfers a substrate from the primary location to the secondary one, and transfers substrates from either location to the process chamber. The use of the dual-location paddle allows for a significant reduction in cycle-time over a single paddle location and a Bernoulli wand system.
