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Document Number
US Patent 6246480
Issued Date
June 12, 2001
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Abstract
An improved stepped etalon comprises a transparent body having a stepped surface. Adjacent step lands are separated from each other by a transition region which includes a curved, waved, or otherwise varied step wall such that the average height of the stepped surface does not change abruptly in the transition region from the height of one land to another, but instead varies gradually according to the particular shape of the step wall. In an alternative embodiment, the step transition is formed using a grey-scale or half-tone patterning in which the average height gradually varies across the transition region. The non-planar transition region reduces the amount of coherent interference caused by the step transition thereby reducing the dead spot behind the step transition portions where interference prevents accurate measurements of light transmission from being made.
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Number of Claims:
12
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Owner
Lucent Technologies Inc. (Murray Hill, NJ)
Published
June 12, 2001
Application Number
09/388,345
Filed
September 1, 1999
US Classification
356/454   356/506
Int'l Classification
G01J   3/12   (20060101)   G01J   3/26   (20060101)   G01J   9/02   (20060101)   G02B   5/28   (20060101)   G01J   9/00   (20060101)  
Examiner
Attorney/Law Firm
USPTO Field of Search
356/454   356/509  
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