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Transparent substrate mounting platform, transparent substrate scratch inspection device, transparent substrate bevelling inspection method and device, and transparent substrate inspection method
   
Document Number
US Patent 6256091
Issued Date
July 3, 2001
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Abstract
When mounting crystal blanks, crystal blanks can be mounted readily in a desired position on a mounting platform, and during pick-up, they can be readily detached from the mounting platform. To inspect scratches in a crystal blank 1, diffused oblique light is shined onto the crystal blank 1 from below by light-emitting diodes 6, and light reflected by scratches on the crystal blank 1 is detected by image capturing means 11 directly above the crystal blank 1. The crystal blank 1 is conveyed to the mounting platform 2 by a conveyor robot arm 15, and after inspection, it is conveyed away by same. A plurality of grooves are formed in the mounting surface 3 of the mounting platform 2. Thereby, during mounting, the crystal blank 1 does not slide over the mounting platform 2 and after mounting, it does not adhere tightly to the mounting platform 2.
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Transparent substrate mounting platform, transparent substrate scratch inspection device, transparent substrate bevelling inspection method and device, and transparent substrate inspection method - US Patent 6256091 Drawing
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Number of Claims:
19
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Owner
Published
July 3, 2001
Application Number
09/134,359
Filed
August 14, 1998
US Classification
356/237.1   356/632
Int'l Classification
G01N   21/88   (20060101)  
Examiner
Assistant Examiner
Attorney/Law Firm
Priority Data
Aug 25, 1997 [JP] 9-227920 Feb 18, 1998 [JP] 10-036318 Feb 18, 1998 [JP] 10-036340
USPTO Field of Search
356/237.1   356/239   356/382  
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Description
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