A light source device includes a lamp for emitting light and a concave mirror for reflecting the light emitted from the lamp. The concave mirror has a reflection surface substantially rotationally symmetric with respect to an optical axis of the concave mirror. A shadow of the lamp is projected in a direction inclined with respect to the optical axis of the concave mirror.
A scanning exposure apparatus includes a master stage which holds a master and moves in a predetermined scanning direction, a projection optical system which projects a pattern of the master onto a substrate, and an optical element which is held by the master stage and moved together with the master. The optical element is so constituted as to optically correct a shift of the master held by the master stage from an ideal state.
An exposure apparatus includes a projection optical system for projecting a pattern, which has been formed on a reticle, onto a photosensitive substrate, wherein a projection region of the pattern, which region is formed on the substrate via the projection optical system, is formed at a position that is off-centered with respect to an optical axis of the projection optical system, a substrate stage capable of holding and moving the substrate, a substrate transport system for transporting the substrate to the substrate stage, wherein the substrate transport system is disposed on the side of the projection region with respect to the optical axis, and the substrate transport system and the substrate stage are arranged in a divided space which is purged with inert gas, and a position detection system for detecting an alignment mark on the substrate.
