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Apparatus for producing liquid mixture having predetermined concentration of a specific component    

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United States Patent6290384   
Link to this pagehttp://www.wikipatents.com/6290384.html
Inventor(s)Pozniak; Peter M. (San Jose, CA), Roberts; Benjamin R. (Los Altos, CA), Jansen; Frank (Walnut Creek, CA)
AbstractA method and apparatus for producing a liquid mixture in which mixture components are mixed to produce a product stream having a predetermined connection of a specified component. This mixing occurs within a fluidic network designed such that the components mix in inlet branches to form a first intermediate mixture having a lower concentration than that desired in the product stream. The specified component is metered into the intermediate product stream to produce a second intermediate product stream that is blended to produce a third intermediate product stream. The concentration of the specified component within the third intermediate product stream is measured and the metering pump is appropriately adjusted. The third intermediate product stream then passes through a recycle loop in which recycled product is mixed with an intermediate product stream to produce a liquid mixture stream that is divided into the recycle stream and a product stream.
   














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Drawing from US Patent 6290384
Apparatus for producing liquid mixture having predetermined concentration
     of a specific component - US Patent 6290384 Drawing
Apparatus for producing liquid mixture having predetermined concentration of a specific component
Inventor     Pozniak; Peter M. (San Jose, CA) , Roberts; Benjamin R. (Los Altos, CA) , Jansen; Frank (Walnut Creek, CA)
Owner/Assignee     The BOC Group, Inc. (New Providence, NJ)
Patent assignment
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Company News
Publication Date     September 18, 2001
Application Number     09/479,290
PAIR File History     Application Data   Transaction History
Image File Wrapper   Patent Term   Fees
Litigation
Filing Date     January 6, 2000
US Classification     366/136 366/152.4 366/160.2
Int'l Classification    
Examiner     Cooley; Charles E.
Assistant Examiner    
Attorney/Law Firm     Cohen; Joshua L. Pace; Salvatore P.
Address
Parent Case     RELATED APPLICATIONS This is a division of application Ser. No. 09/198,686 filed Nov. 24, 1998.
Priority Data    
USPTO Field of Search     366/132 366/134 366/136 366/137 366/142 366/152.1 366/152.4 366/152.6 366/153.1 366/160.1 366/2 366/3 366/4 366/5 366/6 366/7 366/8 366/9 366/10 366/11 366/12 366/13 366/14 366/15 366/16 366/17 366/18 366/19 366/20 366/21 366/22 366/23 366/24 366/25 366/26 366/27 366/28 366/29 366/30 366/31 366/32 366/33 366/34 366/35 366/36 366/37 366/38 366/39 366/40 366/41 366/42 366/43 366/44 366/45 366/46 366/47 366/48 366/49 366/50 366/51 366/52 366/53 366/54 366/55 366/56 366/57 366/58 366/59 366/60 366/61 366/62 366/63 366/64 366/65 366/66 366/67 366/68 366/69 366/70 366/71 366/72 366/73 366/74 366/75 366/76 366/77 366/78 366/79 366/80 366/81 366/82 366/83 366/84 366/85 366/86 366/87 366/88 366/89 366/90 366/91 366/92 366/93 366/94 366/95 366/96 366/97 366/98 366/99 366/100 366/101 366/102 366/103 366/104 366/105 366/106 366/107 366/108 366/109 366/110 366/111 366/112 366/113 366/114 366/115 366/116 366/117 366/118 366/119 366/120 366/121 366/122 366/123 366/124 366/125 366/126 366/127 366/128 366/129 366/130 366/131 366/132 366/133 366/134 366/135 366/136 366/137 366/138 366/139 366/140 366/141 366/142 366/143 366/144 366/145 366/146 366/147 366/148 366/149 366/150 366/151 366/152 366/153 366/154 366/155 366/156 366/157 366/158 366/159 366/160.3 366/160.5 366/182.1 366/182.2 137/3 137/5 137/93 137/563
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5980836
Moffett et al.

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We claim:

1. An apparatus for producing a product stream having a liquid mixture with a predetermined concentration of a specified component, said apparatus comprising:

a fluidic network, comprising:

two inlet branches in flow communication to mix component streams, at least one of said inlet branches containing said specified component to form a first intermediate mixture stream having a lower concentration of said specified component than said predetermined concentration;

remotely activated cut-off valves within said inlet branches of said fluidic network, said cut-off valves being operable to assume open and closed positions;

an intermediate branch having an inlet to introduce a stream of said specified component into said first intermediate mixture stream to form a second intermediate mixture stream;

means for blending said second intermediate mixture stream to produce a third intermediate mixture stream; and

a recycle loop, comprising:

an inlet junction connected to said intermediate branch,

an outlet junction in flow communication with an outlet to discharge a product stream, and

a recycle leg communicating between said inlet junction and said outlet junction thereby to introduce a recycle stream into said third intermediate stream to form a liquid mixture stream, said liquid mixture stream dividing at said outlet junction to form said recycle stream and said product stream thereby continually recycling a part of said liquid mixture stream into said third intermediate stream while the product stream is being discharged;

a pump located within said recycle loop to pump said liquid mixture stream;

a pressure vessel in communication with said pump;

means for sensing the liquid level within said pressure vessel;

a controller responsive to said liquid level sensing means, said controller connected to said remotely activated cut-off valves and adapted to control said valves to be open when the liquid level in said pressure vessel rises to a high level;

means for measuring the concentration of said specified component within said third intermediate mixture stream; and

means for metering said introduction of said stream of said specified component into said first intermediate mixture stream so that said third intermediate mixture stream contains said specified component in said predetermined concentration.

2. The apparatus in accordance with claim 1, further comprising:

a reservoir for said specified component stream, wherein said metering means comprises:

a metering pump connected to said inlet of said intermediate branch to pump said specified component stream from said reservoir into said first intermediate mixture stream, and

another controller responsive to said third intermediate mixture stream specified component concentration measuring means to control said metering pump so that the concentration of said specified component within said third intermediate mixture stream is about said predetermined concentration.

3. The apparatus in accordance with claim 2, wherein said measuring means for said third intermediate mixture stream specified component concentration comprises: a conductivity sensor; and said second intermediate mixture stream blending means comprises: a static mixer for blending said second intermediate mixture stream.

4. The apparatus in accordance with claim 1, wherein said measuring means for said third intermediate mixture stream specified component concentration comprises: a conductivity sensor; and said second intermediate mixture stream blending means comprises: a static mixer for blending said second intermediate mixture stream.

5. The apparatus for producing a product stream having a liquid mixture with a predetermined concentration of a specified component, said apparatus comprising:

a fluidic network, comprising:

two inlet branches in flow communication to mix component streams, at least one of said inlet branches containing said specified component to form a first intermediate mixture stream having a lower concentration of said specified component than said predetermined concentration;

an intermediate branch having an inlet to introduce a stream of said specified component into said first intermediate mixture stream to form a second intermediate mixture stream;

means for blending said second intermediate mixture stream to produce a third intermediate mixture stream;

a recycle loop comprising:

an inlet junction connected to said intermediate branch,

an outlet junction in flow communication with an outlet to discharge a product stream, and

a recycle leg communicating between said inlet junction and said outlet junction thereby to introduce a recycle stream into said third intermediate stream to form a liquid mixture stream, said liquid mixture stream dividing at said outlet junction to form said recycle stream and said product stream thereby continually recycling a part of said liquid mixture stream into said third intermediate stream while the product stream is being discharged;

means for measuring the concentration of said specified component within said third intermediate mixture stream;

means for metering said introduction of said stream of said specified component into said first intermediate mixture stream so that said third intermediate mixture stream contains said specified component in said predetermined concentration;

a reservoir for said specified component stream;

wherein said specified component metering means comprises:

a metering pump connected to said inlet of said intermediate branch to pump said specified component stream from said reservoir into said first intermediate mixture stream, and

a controller responsive to said third intermediate mixture stream specified component concentration measuring means to control said metering pump so that the concentration of said specified component within said third intermediate mixture stream is about said predetermined concentration.

6. The apparatus in accordance with claim 5, further comprising:

remotely activated cut-off valves within said inlet branches of said fluidic network, said cut-off valves being operable to assume open and closed positions;

a pump located within said recycle loop to pump said liquid mixture stream;

a pressure vessel in communication with said pump;

means for sensing the liquid level within said pressure vessel; and

a controller responsive to said liquid level sensing means, said controller connected to said remotely activated cut-off valves and configured to control said valves such that they assume the open position when the liquid level in said pressure vessel rises to a high level.

7. The apparatus in accordance with claim 6, wherein said third intermediate mixture stream specified component concentration measuring means comprises: a conductivity sensor; and said second intermediate mixture steam blending means comprises: a static mixture.

8. The apparatus in accordance with claim 5, wherein said measuring means for said third intermediate mixture stream specified component concentration comprises: a conductivity sensor; and said second intermediate mixture stream blending means comprises: a static mixer for blending said second intermediate mixture stream.
 Description Submit all comments and votes
 


BACKGROUND

The present invention relates to a method and apparatus for producing a liquid mixture having a pre-determined concentration of a specified component. More particularly, the present invention relates to such a method and apparatus in which component streams are mixed together to form an intermediate mixture having a lower concentration of the specified component than that desired for the mixture and a stream containing the specified component is added to such intermediate mixture so that the resultant stream has a pre-determined concentration of the specified component. Even more particularly, the present invention relates to such a method and apparatus in which part of the two component mixture is recycled to increase the homogeneity of the product.

There are many industrial processes that utilize liquid mixtures in which the concentration of the components of the mixture is particularly critical for the successful performance of the process. For example, in the manufacture of semiconductors, it is necessary that between processing steps, the wafer being processed be cleaned with an aqueous ammonia water solution.

The problem with producing such a solution with repeatable accuracy is that often the components are retrieved from bulk sources in which the components are mixed with other agents. As a result, the concentration of the components does not remain constant. For instance, in forming the aqueous ammonia solution, the ammonia component is drawn from a bulk source in the form of ammoniated water. Over time, however, the ammonia concentration within the water decreases due to the vapor pressure of the ammonia.

As will be discussed the present invention provides a method and apparatus for producing a liquid mixture with a reliably consistent concentration of the desired component.

SUMMARY OF THE INVENTION

In one aspect, the present provides a method of producing a liquid mixture having a pre-determined concentration of the specified component. In this regard, the term "mixture" as used herein and in the claims means either a suspension or a true solution. In accordance with the method, component streams are mixed together to form a first intermediate mixture stream having a lower concentration of the specified component than the pre-determined concentration. A stream containing the specified component is introduced into the first intermediate mixture stream to form a second intermediate mixture stream. The second intermediate mixture stream is then blended to produce a third intermediate mixture stream. The concentration of the third intermediate mixture stream is measured and the introduction of the stream containing the specified component is metered so that the intermediate mixture stream contains the specified component in the pre-determined concentration. A recycle stream, composed of the liquid mixture, is introduced into the intermediate stream to form a liquid mixture stream of the liquid mixture. The liquid mixture stream is divided into the recycle stream and a product stream.

In another aspect, the present invention provides an apparatus for producing a liquid mixture having a pre-determined concentration of a specified component.

The apparatus consists of a fluidic network having two inlet branches to mix component streams to form a first intermediate mixture stream having a lower concentration than the specified component of the pre-determined concentration. An intermediate branch is provided having an inlet to introduce a stream of the first component into the first intermediate mixture stream to form a second intermediate mixture stream. A means for blending the second intermediate mixture stream of the liquid mixture stream is provided to produce a third intermediate mixture. A recycle loop is also provided. The recycle loop has an inlet junction connected to the intermediate branch and an outlet junction to discharge a product stream composed of part of the liquid mixture stream. The recycle loop communicates between the outlet junction and the inlet junction, thereby to introduce a recycle stream composed of the remaining part liquid mixture into the third intermediate mixture stream to form a liquid mixture stream of the liquid mixture and to divide the liquid mixture stream into the recycle stream and a product stream. Also provided is a means for measuring the concentration of the intermediate mixture and a means for metering the introduction of the stream containing the specified component so that the first intermediate mixture stream contains the specified component in the pre-determined concentration.

As can be appreciated, since the first intermediate product stream has a lower concentration then that desired in the final