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Method and apparatus for generating a plasma    

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United States Patent6297595   
Link to this pagehttp://www.wikipatents.com/6297595.html
Inventor(s)Stimson; Bradley O. (San Jose, CA); Forster; John (San Francisco, CA)
AbstractA method and apparatus for generating a plasma by inductively coupling electromagnetic energy into the plasma. In one embodiment, first and second antenna coils are disposed about the circumference of the plasma containment area. The first and second antenna coils are relatively spaced along the longitudinal axis of the plasma containment area. A current is generated in the first and second antenna coils. A phase shift regulating network establishes a difference between the phase of the current in the first antenna and the phase of the current in the second antenna. The phase difference corresponds to the phase difference required to launch a helicon wave in the plasma. In a second embodiment, a chamber shield is made of a conductive material and is coupled to the RF source such that the shield functions as an RF antenna. The shield may be coupled in series to a coil surrounding the shield to increase the resultant flux density.
   














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Patent Text Patent PDF Print Page Summary File History
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Inventor     Stimson; Bradley O. (San Jose, CA); Forster; John (San Francisco, CA)
Owner/Assignee     Applied Materials, Inc. (Santa Clara, CA)
Patent assignment
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Company News
Publication Date     October 2, 2001
Application Number     09/049,276
PAIR File History     Application Data   Transaction History
Image File Wrapper   Patent Term   Fees
Litigation
Filing Date     March 27, 1998
US Classification     315/111.51 315/111.21
Int'l Classification     H01J 007/24
Examiner     Philogene; Haissa
Assistant Examiner    
Attorney/Law Firm     Konrad Raynes & Victor, LLP
Address
Parent Case     This a division of application Ser. No. 08/559,345 filed on Nov. 15, 1995.
Priority Data    
USPTO Field of Search     315/111.51 315/111.21 315/111.41 315/334 315/248 204/298.16 204/298.37 156/345 118/723
Patent Tags     generating plasma
   
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