Selective etching of thin films - Patent Review 6306313

WikiPatents - Community Patent Review

Create Free Account | License or Sell Your Patent | WikiPatents Marketplace | WikiPatents Blog

counter customizable free hit

Selective etching of thin films
United States Patent	6306313
Link to this page	http://www.wikipatents.com/6306313.html
Inventor(s)	Fetter; Linus Albert (Morganville, NJ); Pastalan; John Z. (Hampton, NJ)
Abstract	The invention removes a portion(s) of a material of interest, while leaving an adjacent or underlying electrode(s) intact. The material is exposed to a plasma containing at least two-halogen-containing gases. At least a portion of the material, for example a piezoelectric material, an oxygen-containing material, or a nitrogen-containing material, is etched by the plasma. By removing desired portions of this material, the device can have alternative or complex architecture. In addition, the propagation of shear waves is limited in the device.

References Submit all comments and votes

Submit all comments and votes

*references marked with an asterisk below are user-added references

U.S. References

Add a new US reference:
[Vote on relevancy & make comments] [Display results only]
Reference	Relevancy	Comments	Reference	Relevancy	Comments
2303457	Your vote accepted [0 after 0 votes]		6215375 Larson, III 333/187 Apr,2001	Your vote accepted [0 after 0 votes]
6204737 Ella 333/187 Mar,2001	Your vote accepted [0 after 0 votes]		6198208 Yano 310/358 Mar,2001	Your vote accepted [0 after 0 votes]
6150703 Cushman Nov,2000	Your vote accepted [0 after 0 votes]		6127768 Stoner 310/313A Oct,2000	Your vote accepted [0 after 0 votes]
6087198 Panasik Jul,2000	Your vote accepted [0 after 0 votes]		6081171 Ella Jun,2000	Your vote accepted [0 after 0 votes]
6060818 Ruby May,2000	Your vote accepted [0 after 0 votes]		6051907 Ylilammi Apr,2000	Your vote accepted [0 after 0 votes]
5963856 Kim 455/307 Oct,1999	Your vote accepted [0 after 0 votes]		5942958 Lakin 333/189 Aug,1999	Your vote accepted [0 after 0 votes]
5928598 Anderson 264/446 Jul,1999	Your vote accepted [0 after 0 votes]		5910756 Ella 333/133 Jun,1999	Your vote accepted [0 after 0 votes]
5906950 Keller 438/719 May,1999	Your vote accepted [0 after 0 votes]		5900163 Yi May,1999	Your vote accepted [0 after 0 votes]
5894647 Lakin 29/25.35 Apr,1999	Your vote accepted [0 after 0 votes]		5884378 Dydyk 29/25.35 Mar,1999	Your vote accepted [0 after 0 votes]
5883575 Ruby 340/572.5 Mar,1999	Your vote accepted [0 after 0 votes]		5873154 Ylilammi 29/25.35 Feb,1999	Your vote accepted [0 after 0 votes]
5873153 Ruby 29/25.35 Feb,1999	Your vote accepted [0 after 0 votes]		5872493 Ella 333/191 Feb,1999	Your vote accepted [0 after 0 votes]
5864261 Weber 333/187 Jan,1999	Your vote accepted [0 after 0 votes]		5858086 Hunter Jan,1999	Your vote accepted [0 after 0 votes]
5853601 Krishaswamy Dec,1998	Your vote accepted [0 after 0 votes]		5830774 Klingbeil, Jr. 438/672 Nov,1998	Your vote accepted [0 after 0 votes]
5821833 Lakin 333/187 Oct,1998	Your vote accepted [0 after 0 votes]		5821170 Klingbeil, Jr. 438/745 Oct,1998	Your vote accepted [0 after 0 votes]
5801476 Sturzebecher 310/324 Sep,1998	Your vote accepted [0 after 0 votes]		5789845 Wadaka 310/334 Aug,1998	Your vote accepted [0 after 0 votes]
5780713 Ruby 73/1.82 Jul,1998	Your vote accepted [0 after 0 votes]		5760663 Pradal 333/187 Jun,1998	Your vote accepted [0 after 0 votes]
5741742 Kamide 438/653 Apr,1998	Your vote accepted [0 after 0 votes]		5714917 Ella 332/144 Feb,1998	Your vote accepted [0 after 0 votes]
5707901 Cho 438/595 Jan,1998	Your vote accepted [0 after 0 votes]		5702775 Anderson 428/1.62 Dec,1997	Your vote accepted [0 after 0 votes]
5698928 Mang Dec,1997	Your vote accepted [0 after 0 votes]		5692279 Mang 29/25.35 Dec,1997	Your vote accepted [0 after 0 votes]
5646583 Seabury 333/187 Jul,1997	Your vote accepted [0 after 0 votes]		5630949 Lakin 216/61 May,1997	Your vote accepted [0 after 0 votes]
5617065 Dydyk Apr,1997	Your vote accepted [0 after 0 votes]		5597444 Gilton 438/710 Jan,1997	Your vote accepted [0 after 0 votes]
5596239 Dydyk 310/311 Jan,1997	Your vote accepted [0 after 0 votes]		5587620 Ruby 310/346 Dec,1996	Your vote accepted [0 after 0 votes]
5552655 Stokes 310/330 Sep,1996	Your vote accepted [0 after 0 votes]		5446306 Stokes 257/416 Aug,1995	Your vote accepted [0 after 0 votes]
5438554 Seyed-Bolorforosh 367/140 Aug,1995	Your vote accepted [0 after 0 votes]		5404628 Ketcham 29/25.35 Apr,1995	Your vote accepted [0 after 0 votes]
5403701 Lum 430/315 Apr,1995	Your vote accepted [0 after 0 votes]		5381385 Greenstein 367/140 Jan,1995	Your vote accepted [0 after 0 votes]
5373268 Dworsky 333/187 Dec,1994	Your vote accepted [0 after 0 votes]		5369053 Fang 438/637 Nov,1994	Your vote accepted [0 after 0 votes]
5367308 Weber 343/700MS Nov,1994	Your vote accepted [0 after 0 votes]		5348617 Braymen 216/2 Sep,1994	Your vote accepted [0 after 0 votes]
5334960 Penunuri 333/193 Aug,1994	Your vote accepted [0 after 0 votes]		5294898 Dworsky Mar,1994	Your vote accepted [0 after 0 votes]
5291159 Vale 333/188 Mar,1994	Your vote accepted [0 after 0 votes]		5283458 Stokes 257/416 Feb,1994	Your vote accepted [0 after 0 votes]
5233259 Krishnaswamy 310/324 Aug,1993	Your vote accepted [0 after 0 votes]		5232571 Braymen 204/192.22 Aug,1993	Your vote accepted [0 after 0 votes]
5231327 Ketcham 310/366 Jul,1993	Your vote accepted [0 after 0 votes]		5185589 Krishnaswamy 333/133 Feb,1993	Your vote accepted [0 after 0 votes]
5166646 Avanic Nov,1992	Your vote accepted [0 after 0 votes]		5075641 Weber Dec,1991	Your vote accepted [0 after 0 votes]
4988957 Thompson 331/107A Jan,1991	Your vote accepted [0 after 0 votes]		4890370 Fukuda Jan,1990	Your vote accepted [0 after 0 votes]
4719383 Wang 310/324 Jan,1988	Your vote accepted [0 after 0 votes]		4556812 Kline 310/324 Dec,1985	Your vote accepted [0 after 0 votes]
4502932 Kline 204/192.18 Mar,1985	Your vote accepted [0 after 0 votes]
[Vote on relevancy & make comments] [Display results only]

Foreign References

Other References