Installation for analyzing the level of at least one element, from at least two initial gas sources (S.sub.1, S.sub.2, . . . ) in a sampling procedure, using at least one analyzer (A.sub.1, A.sub.2, . . . ) capable of analyzing the element, including: at least two sources (S.sub.1, S.sub.2, . . . ) of initial gases to be analyzed; at least two tapping lines (L.sub.p1, L.sub.p2, . . . ), each line being connected in its upstream part to one of the initial gas sources, and in its downstream part to a respective flow-directing component (V.sub.1, V.sub.2. . . ); at least two discharge lines (L.sub.E1, L.sub.E2, . . . ), each discharge line being connected in its upstream part to one of the directing components and in its downstream part to a discharge or to a storage point (E.sub.1, E.sub.2, . . . ); at least two secondary lines (L.sub.s1, L.sub.s2, . . . ), each secondary line being connected in its upstream part to one of the directing components and, in its downstream part, to a collection point (R), each directing component being capable of directing a sample from the initial gas source which is associated with it to its respective discharge line or to the collection point via its respective secondary line; a tertiary line (L.sub.T), connected in its upstream part to the collection point and in its downstream part to a discharge or to a storage point (E); at least one analysis line (L.sub.Ai), connected in its upstream part to the tertiary line and in its downstream part to at least one of the at least one analyzers.
An air-sampling carrier for sampling air from a clean room of a semiconductor processing facility, an apparatus and a method for analyzing the air, wherein the air-sampling carrier includes a container having an inner space, a door mounted at a front wall of the container, a discharging pipe for discharging the air sample out of the container, and at least one inlet tube for introducing purge gas into the inner space of the container from outside the container. The discharging pipe and inlet tube are respectively formed on an outer surface of the container and connected to an inner space of the container. The air in the unit process tools is effectively sampled using an unmanned carrying apparatus and the pollution level of the air sample is simply and easily measured.
