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Document Number
US Patent 6338795
Issued Date
January 15, 2002
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Abstract
A second purifying apparatus 2 for furthermore purifying working solution purified by a first purifying apparatus 1 is disposed downstream of the first purifying apparatus 1. A working-solution introducing pipe 42 which is capable of diffusing and discharging the working solution from the lower end thereof is disposed in substantially the central portion of the working-solution accumulating tank 40 in which the working solution is accumulated. A filter 44 for vertically sectioning the working-solution accumulating tank 40 at an intermediate position is provided. A weir 45 is formed at an upper end of the working-solution accumulating tank 40. Moreover, a separating wall is formed along the inner wall of the weir 45. A solution gathering groove 47 is provided for the outer surface of the weir 45.
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Number of Claims:
22
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Published
January 15, 2002
Application Number
09/481,694
Filed
January 12, 2000
US Classification
210/167.04   210/187 210/194 210/195.1 210/295 210/298 210/320 210/322 210/512.1 210/526
Int'l Classification
B23Q   11/10   (20060101)   C10M   175/04   (20060101)   C10M   175/00   (20060101)   B01D   21/00   (20060101)   B01D   21/24   (20060101)  
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USPTO Field of Search
210/241.3   210/295   210/298   210/194   210/195.1   210/168   210/526   210/187   210/512.1   210/322   210/320  
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Description
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