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Three-dimensional shape measuring apparatus
   
Document Number
US Patent 6373978
Issued Date
April 16, 2002
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Abstract
A three-dimensional shape measuring apparatus which has an improved arrayed confocal imaging system. A three-dimensional shape measuring apparatus using a confocal imaging system which has a new means for changing the distance in the Z direction between the object and the object-position-in-focus, instead of an object stage moved in the Z direction. This means shifts the object-position-in-focus in the Z direction by refraction. One means inserts a plurality of transparent flat plates between the objective lens and the object-position-in-focus in turn. Another means uses a transparent flat plate made of a material for which the refractive index changes according to the voltage applied and is disposed between the object and the object-position-in-focus. A three-dimensional shape measuring apparatus using a confocal imaging system wherein an image processor estimates the position from which the intensity of the reflected light for each pixel of the confocal image becomes maximum by interpolation of a value from the curve of the relationship between the intensity of light detected and the distance from the object-position-in-focus to an object point.
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Three-dimensional shape measuring apparatus - US Patent 6373978 Drawing
Drawing from US Patent 6373978
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Number of Claims:
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Published
April 16, 2002
Application Number
09/552,880
Filed
April 20, 2000
US Classification
382/154  
Int'l Classification
G01B   11/24   (20060101)   G01B   11/02   (20060101)  
Examiner
Assistant Examiner
Parent Case
This application is a Divisional of application Ser. No. 09/263,879 filed on Mar. 8, 1999 now U.S. Pat. No. 6,108,090; which is a Divisional of application Ser. No. 08/959,491 filed on Oct. 28, 1997 now U.S. Pat. No. 5,946,100; which is a Divisional of application Ser. No. 08/721,051 filed on Sep. 26, 1996 now U.S. Pat. No. 5,737,084.
Priority Data
Sep 29, 1995 [JP] 7-275060 Nov 02, 1995 [JP] 7-308587 Mar 26, 1996 [JP] 8-094682
USPTO Field of Search
382/141   382/142   382/143   382/144   382/145   382/146   382/147   382/148   382/149   382/150   382/151   382/152   382/153   382/154   382/285   356/376   359/566   359/569   359/245  
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