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Hybrid curvature-tilt wave front sensor
   
Document Number
US Patent 6396588
Issued Date
May 28, 2002
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Inventors
Sei; Alain (Pasadena, CA)
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Abstract
A hybrid curvature/tilt wave front sensor (50) that employs both tilt measurements and curvature measurements of the wave front of a light beam (16). The light beam (16) is split into a first path and a second path. The light beam (16) on the first path is directed to a tilt sensor (12) employing a lenslet array (24) having a plurality of lenses (26). The lenses (26) focus separate portions (32) of the wave front onto a CCD (28) that provides local intensity measurements. A computer (30) receives electrical information of the intensity of the various beam portions (32) and computes a tilt measurement based on this information. The light beam (16) on the second path is directed to a curvature sensor (14) that includes a pair of CCDs (40, 42) positioned at the same distance before and after the focal plane of a lens (52). The intensity measurement of the beam (16) at these locations is sent to the computer (30) which performs curvature measurements on the beam wave front. Algorithms are employed to determine the phase of the wave front based on the tilt and curvature measurements.
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Hybrid curvature-tilt wave front sensor - US Patent 6396588 Drawing
Drawing from US Patent 6396588
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Number of Claims:
20
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Owner
TRW Inc. (Redondo Beach, CA)
Published
May 28, 2002
Application Number
09/413,584
Filed
October 6, 1999
US Classification
356/512   250/201.9
Int'l Classification
G01J   9/00   (20060101)  
USPTO Field of Search
250/201.9   356/5.1   356/363   356/371   356/121   356/512   356/508   356/510  
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