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Partially ionized plasma mass filter
   
Document Number
US Patent 6398920
Issued Date
June 4, 2002
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Abstract
A filter and a method for separating ions in a partially ionized plasma according to their mass includes a chamber with crossed electric and magnetic fields established therein. A feed, including metal atoms having ionization potentials in a low range, and gas atoms having an ionization potential in a high range, is introduced into the chamber. An electron temperature below the low range is generated to partially ionize the feed by dissociating the metal atoms from the gas atoms, and by ionizing the metal atoms into light and heavy ions according to their mass to charge ratio. The light and heavy ions are then influenced by the crossed electric and magnetic fields to separate the light ions from the heavy ions.
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Number of Claims:
20
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Published
June 4, 2002
Application Number
09/790,357
Filed
February 21, 2001
US Classification
204/156   422/186
Int'l Classification
H01J   49/26   (20060101)   H01J   49/28   (20060101)  
Examiner
Attorney/Law Firm
USPTO Field of Search
204/156   422/186  
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