US Patent 6459151 - Structure and process of via chain for misalignment test

Structure and process of via chain for misalignment test

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Document Number

US Patent 6459151

Issued Date

October 1, 2002

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Inventors

Chung; Chi-Long (Hsinchu,TW)

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Chiu; Eddie (Hsinchu,TW)

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Chen; Chun-Lin (Hsinchu,TW)

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Chiu; Sheng-Fen (Hsinchu,TW)

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Abstract

A structure or a process of the via chain is employed to test the misalignment. The structure of the via chain includes a first via chain in the first direction and a second via chain in the second direction. Using the structure having the via chains in two different directions, the misalignment can be easily detected.

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