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Claims  |
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What is claimed is:
1. A dielectric ceramic material comprising a component represented by the
formula ABO.sub.3 and a rare earth element serving as an additional
component, A in the formula representing Ba, Ca, Sr or a combination
thereof, B in the formula representing Ti, Zr, Hf or a combination
thereof, and O in the formula representing oxygen, wherein
0.7.ltoreq.M/N
and
0.8.ltoreq.L/N
where M is the number of crystal grains that constitute the ceramic and
which satisfy 0.5.ltoreq.D.sub.i /D, N is the number of crystal grains
constituting the ceramic, and L is the number of crystal grains
constituting the ceramic in which 0.5.ltoreq.D.sub.i /D and S.sub.i
/D.ltoreq.0.3 wherein D.sub.i is the mean density of the rare earth
element in an arbitrary crystal grain i of the crystal grains that
constitute the ceramic material, D is the mean density of the rare earth
element in the entirety of the ceramic material and S.sub.i is the
standard deviation of the density of the rare earth element in the crystal
grain i.
2. A dielectric ceramic material according to claim 1, wherein the crystal
grains have a size of which the mean is about 0.005-0.70 .mu.m and the
standard deviation is about 30% or less.
3. A dielectric ceramic material according to claim 2, wherein A comprises
Ba and B comprises Ti.
4. A dielectric ceramic material according to claim 3, wherein the rare
earth element is selected from the group consisting of Dy, Nd, Gd, Er, and
Yb.
5. A dielectric ceramic material according to claim 1, wherein A comprises
Ba and B comprises Ti.
6. A dielectric ceramic material according to claim 1, wherein the rare
earth element is selected from the group consisting of Dy, Nd, Gd, Er, and
Yb.
7. A monolithic ceramic electronic element comprising a laminate including
a plurality of stacked laminated dielectric ceramic layers and at least 2
internal electrodes each of which is disposed at an interface between two
dielectric ceramic layers adjacent to each other, wherein the dielectric
ceramic layers are a dielectric material as recited in claim 6.
8. A monolithic ceramic electronic element according to claim 7, wherein
the internal electrodes comprise a base metal.
9. A monolithic ceramic electronic element according to claim 7, further
comprising first and second external electrodes on an outer surface of the
laminate, wherein a pair of internal electrodes are substantially parallel
to an overlap one another with respect to the stacking direction of the
laminate, and one of the internal electrodes is electronically connected
to the first external electrode and the other internal electrode is
electronically connected to the second external electrode, to thereby
constitute a monolithic ceramic capacitor.
10. A monolithic ceramic electronic element comprising a laminate including
a plurality of stacked laminated dielectric ceramic layers and at least 2
internal electrodes each of which is disposed at an interface between two
dielectric ceramic layers adjacent to each other, wherein the dielectric
ceramic layers are a dielectric material as recited in claim 5.
11. A monolithic ceramic electronic element according to claim 10, wherein
the internal electrodes comprise a base metal.
12. A monolithic ceramic electronic element according to claim 10, further
comprising first and second external electrodes on an outer surface of the
laminate, wherein a pair of internal electrodes are substantially parallel
to and overlap one another with respect to the stacking direction of the
laminate, and one of the internal electrodes is electrically connected to
the first external electrode and the other internal electrode is
electronically connected to the second external electrode, to thereby
constitute a monolithic ceramic capacitor.
13. A monolithic ceramic electronic element comprising a laminate including
a plurality of stacked laminated dielectric ceramic layers and at least 2
internal electrodes each of which is disposed at an interface between two
dielectric ceramic layers adjacent to each other, wherein the dielectric
ceramic layers are a dielectric material as recited in claim 2.
14. A monolithic ceramic electronic element according to claim 13, wherein
the internal electrodes comprise a base metal.
15. A monolithic ceramic electronic element according to claim 14, wherein
the internal electrodes comprise Ni, Cu or an alloy thereof.
16. A monolithic ceramic electronic element according to claim 13, further
comprising first and second external electrodes on an outer surface of the
laminate, wherein a pair of internal electrodes are substantially parallel
to and overlap one another with respect to the stacking direction of the
laminate, and one of the internal electrodes is electrically connected to
the first external electrode and the other internal electrode is
electrically connected to the second external electrode, to thereby
constitute a monolithic ceramic capacitor.
17. A monolithic ceramic electronic element comprising a laminate including
a plurality of stacked laminated dielectric ceramic layers and at least 2
internal electrodes each of which is disposed at an interface between two
dielectric ceramic layers adjacent to each other, wherein the dielectric
ceramic layers are a dielectric material as recited in claim 1.
18. A monolithic ceramic electronic element according to claim 17, wherein
the internal electrodes comprise a base metal.
19. A monolithic ceramic electronic element according to claim 18, wherein
the internal electrodes comprise Ni, Cu or an alloy thereof.
20. A monolithic ceramic electronic element according to claim 17, further
comprising first and second external electrodes on an outer surface of the
laminate, wherein a pair of internal electrodes are substantially parallel
to and overlap one another with respect to the stacking direction of the
laminate, and one of the internal electrodes is electrically connected to
the first external electrode and the other internal electrode is
electrically connected to the second external electrode, to thereby
constitute a monolithic ceramic capacitor. |
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Claims  |
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Description  |
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BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a dielectric ceramic material which is
advantageously employed in a monolithic ceramic electronic element, such
as a monolithic ceramic capacitor comprising an internal electrode formed
of a base metal such as nickel or copper, and to a monolithic ceramic
electronic element which is formed of the dielectric ceramic material.
2. Background Art
Miniaturization and cost reduction of monolithic ceramic electronic
elements are now in progress. For example, a ceramic layer has been
thinned in such a ceramic electronic element, and a base metal has been
employed as an internal electrode. In a monolithic ceramic capacitor,
which is a typical example of a monolithic ceramic electronic element, a
dielectric ceramic layer as thin as approximately 3 .mu.m has been formed
and a base metal such as nickel or copper has been employed as a material
for producing an internal electrode.
However, it is known that when a dielectric ceramic layer becomes thin, the
layer is affected by a strong external electric field, exhibiting a great
variation in dielectric constant per unit of temperature change.
Therefore, there has been demand for a dielectric ceramic material
exhibiting high reliability in a strong electric field, which material
constitutes a dielectric ceramic layer.
Such a dielectric ceramic layer may be formed of an ABO.sub.3 perovskite
dielectric ceramic material. Usually, the ceramic material comprises
crystal grains of core-shell structure. A crystal grain of core-shell
structure comprises a core portion and an outer surface shell portion that
differs in crystal structure and composition.
Such a core-shell structure is created during sintering of a ceramic
material in such a manner that a shell portion is formed through diffusion
of an additional component--usually a rare earth element--from the surface
of a crystal grain which serves as a core. In a conventional thin
dielectric ceramic layer, diffusion of a rare earth element in a shell
portion enhances reliability of the shell portion. As a result,
reliability of the entire ceramic layer is secured.
In more than rare instances, however, grains of core-shell structure
produced have excessively thin shells because of uneven diffusion or
dispersion of the rare earth element. When such a ceramic material
comprising crystal grains of core-shell structure is employed for forming
a dielectric ceramic layer of a monolithic ceramic electronic element and
the ceramic layer is as thin as 3 .mu.m or less, the ceramic layer will
have some portions of low reliability. As a result, reliability of the
monolithic ceramic electronic element may be lowered.
SUMMARY OF THE INVENTION
In view of the foregoing, an object of the present invention is to provide
a dielectric ceramic material which can solve the aforementioned problem,
and a monolithic ceramic electronic element which is formed of the
dielectric ceramic element, such as a monolithic ceramic capacitor.
A more specific object of the present invention is to provide a dielectric
ceramic material having a non-core-shell structure, in which the change in
dielectric constant with temperature is small; and a monolithic ceramic
electronic element which comprises a thin dielectric ceramic layer having
a thickness of about 3 .mu.m or less, which has small size, high
capacitance and high reliability, and which is produced at low cost.
Accordingly, the present invention provides a dielectric ceramic material
comprising a primary component represented by the formula ABO.sub.3 and a
rare earth element serving as an additional component, A in the formula
representing Ba and optionally Ca and/or Sr, B in the formula representing
Ti and optionally Zr and/or Hf, and O in the formula representing oxygen.
When the mean density of a rare earth element in an arbitrary crystal grain
i of the crystal grains that constitute the ceramic material is
represented by D.sub.i, the mean density of the rare earth element in the
entirety of the ceramic material is represented by D, the standard
deviation of the density of the rare earth element in the crystal grain i
is represented by S.sub.i, the number of crystal grains satisfying the
relation 0.5.ltoreq.D.sub.i /D is represented by M, the number of the
crystal grains constituting the ceramic material is represented by N, and
the number of the crystal grains satisfying the relations
0.5.ltoreq.D.sub.i /D and S.sub.i /D.ltoreq.0.3 is represented by L, the
ceramic material satisfies the following relations:
0.7.ltoreq.M/N (i.e., the density of the rare earth element is uniform
among crystal grains) and
0.8.ltoreq.L/N (i.e., the density of the rare earth element is uniform
within a crystal grain).
It must be noted that the aforementioned crystal grain i is not a specific
crystal grain but an arbitrary crystal grain in the dielectric ceramic
material. That is, when the number of the crystal grains that are present
in the material is N, i may be an integer of 1 to N inclusive. Thus, for
each one of the crystal grains that constitute a dielectric ceramic
(number of grains: N), there can be calculated the mean density of the
rare earth element (D.sub.i) in the crystal grains and the standard
deviation of the density of the rare earth element in the crystal grains.
In the dielectric ceramic of the present invention, preferably, the mean
size of the crystal grains is about 0.05-0.7 .mu.m, and the standard
deviation of the size of the crystal grains is about 30% or less the mean
grain size.
The present invention also provides a monolithic ceramic electronic element
which is formed of the aforementioned dielectric ceramic material. More
particularly, the present invention provides a monolithic ceramic
electronic element comprising a laminate comprising a plurality of
laminated dielectric ceramic layers and internal electrodes which are
formed along specific interfaces between two dielectric ceramic layers
adjacent to each other, wherein the dielectric ceramic layer is formed of
the dielectric material.
In the monolithic ceramic electronic element of the present invention, the
internal electrode preferably comprises nickel or copper, or an alloy
thereof.
The present invention can be advantageously applied to, in particular, a
monolithic ceramic capacitor. In such a case, the monolithic ceramic
electronic element of the present invention further comprises first and
second external electrodes which are formed on the outer surfaces of a
laminate, wherein a plurality of internal electrodes are formed such that
the internal electrodes overlap one another with respect to the vertical
direction (stacking direction) of the laminate, and the internal
electrodes which are electrically connected to the first external
electrode and the internal electrodes which are electrically connected to
the second external electrode are alternately provided in the stacking
direction.
In the dielectric ceramic material of the present invention, crystal
grains--in which a rare earth element which exhibits effects on
enhancement of reliability is almost uniformly dispersed--are present over
the entirety of the dielectric ceramic material, and thus local
segregation does not occur. Therefore, the ceramic material exhibits high
reliability, and reliability can be secured from product to product.
In the dielectric ceramic material, the mean size of the crystal grains is
about 0.05-0.7 .mu.m, and the standard deviation of the size of the
crystal grains is about 30% or less the mean grain size, and thus
dependence of the dielectric constant of the material on electric field is
suppressed. In addition, in the case in which the ceramic material is
applied to a monolithic electronic element, even when the thickness of a
dielectric ceramic layer is about 3 .mu.m or less, temperature dependence
of the dielectric constant of the electronic element can be suppressed.
BRIEF DESCRIPTION OF THE DRAWINGS
Various other objects, features, and many of the attendant advantages of
the present invention will be readily appreciated as the same becomes
better understood with reference to the following detailed description of
the preferred embodiments when considered in connection with accompanying
drawings, in which:
FIG. 1 is a sectional view of a monolithic ceramic capacitor 1 of an
embodiment of the present invention; and
FIG. 2 is an exploded perspective view of a laminate 2 which is the
component of the monolithic ceramic capacitor 1 shown in FIG. 1.
BEST MODES FOR CARRYING OUT THE INVENTION
As described above, the dielectric ceramic material of the present
invention comprises a primary component represented by the formula
ABO.sub.3 and a rare earth element serving as an additional component,
characterized in that the density of the rare earth element is uniform
among crystal grains so as to satisfy the relation 0.7.ltoreq.M/N and the
density of the rare earth element is uniform within a crystal grain so as
to satisfy the relation 0.8.ltoreq.L/N.
The raw material powder of the dielectric ceramic material can be produced
through any process, so long as the microstructure which satisfies the
above-described relations regarding the density of the rare earth element
can be formed.
For example, raw material powder of the dielectric ceramic material can be
produced through a process which comprises mixing BaCO.sub.3 and TiO.sub.2
with a portion of an additional component, subjecting the mixture to
thermal treatment to thereby react BaCO.sub.3 and TiO.sub.2 with the
additional component, and then mixing the resultant product with the
remaining portion of the additional component.
The present inventors have confirmed that even when BaTiO.sub.3 is employed
instead of BaCO.sub.3 and TiO.sub.2, the microstructure as described above
can be formed.
In production of raw material powder of the dielectric ceramic material, a
primary component is not necessarily mixed with a portion of an additional
component in advance. An appropriate amount of the additional component
may be added to the primary component so as to form the above-described
microstructure, and the conditions for firing the resultant mixture may be
regulated during sintering.
The above-described microstructure can be formed through a wet-synthesis
method such as a hydrothermal synthesis method, a hydrolysis method, or a
sol-gel method.
The dielectric ceramic material can be produced through firing of the raw
material powder as described above. The dielectric ceramic material is
advantageously employed in a monolithic ceramic electronic element, such
as a monolithic ceramic capacitor 1 shown in FIG. 1.
FIG. 1 is a sectional view of a monolithic ceramic capacitor 1 of an
embodiment of the present invention, and FIG. 2 is an exploded perspective
view of a laminate 2 which is a component of the monolithic ceramic
capacitor 1 shown in FIG. 1.
The monolithic ceramic capacitor 1 comprises the rectangular parallelepiped
laminate 2 comprising a plurality of laminated dielectric ceramic layers 3
and 4, and a plurality of internal electrodes 5 and 6 which are formed
along specific interfaces between the dielectric ceramic layers 4 which
are at mid-position in a stacking direction, such that the electrodes 5
and 6 overlap one another in a stacking direction of the laminate 2.
A first external electrode 7 and a second external electrode 8 are formed
on respective side faces of the laminate 2. The external electrodes 7 and
8 are electrically connected to the specific internal electrodes 5 and 6,
respectively. The internal electrodes 5 which are electrically connected
to the first external electrode 7 and the internal electrodes 6 which are
electrically connected to the second external electrode 8 are arranged
alternately.
First plating layers 9, which comprise, for example, nickel plating or
copper plating, may be formed on the external electrodes 7 and 8. Second
plating layers 10, which comprise, for example, a solder layer or a tin
layer, are formed on the first layers 9.
The production process of the laminated ceramic capacitor 1 will next be
described in the order of production steps.
First, raw material powder of the dielectric ceramic material as described
above is prepared, and a slurry is formed from the powder. The resultant
slurry is formed into a sheet so as to obtain ceramic green sheets for
dielectric ceramic layers 3 and 4.
Subsequently, internal electrodes 5 and 6 comprising a base metal such as
nickel, a nickel alloy, copper or a copper alloy as a conductive component
are formed on the main surface of each of the ceramic green sheets, which
serve as dielectric ceramic layers 4 which are provided at the mid-portion
of a laminate. The internal electrodes 5 and 6 may be formed through a
method such as screen printing, vapor deposition, or plating.
Subsequently, ceramic green sheets serving as the dielectric ceramic layers
4 having the internal electrodes 5 or 6 are laminated as desired, and the
resultant laminated product is sandwiched by two ceramic green sheets
having no internal electrode and serving as dielectric ceramic layers 3
shown in FIG. 2, the layers 3 being provided at the outermost portion.
Then the product is compressed, to thereby obtain a green laminate. p The
green laminate is fired at a predetermined temperature in a non-oxidative
atmosphere, to thereby obtain a laminate 2.
Subsequently, external electrodes 7 and 8 are formed on respective side
faces of the laminate 2 such that they are electrically connected to the
specific internal electrodes 5 and 6. The external electrodes 7 and 8 may
be formed of a material identical with that of the internal electrodes 5
and 6. Examples of the material which may be employed include nickel, a
nickel alloy, gold, copper, a copper alloy, silver, palladium, a
silver-palladium alloy, and a powder of any of these to which is added
glass frit of, for instance, B.sub.2 O.sub.3 --SiO.sub.2 --BaO glass or
Li.sub.2 O--SiO.sub.2 --BaO glass. The material is appropriately chosen in
consideration of the application of the monolithic ceramic capacitor 1 or
the site for its employment.
The external electrodes 7 and 8 are typically formed by applying a metal
powder paste as an electrode material to the laminate 2 which is obtained
through firing, and further baking. Alternatively, the electrodes may be
formed by applying the paste to the unfired laminate 3 and then
simultaneously burning and firing the laminate 3.
Subsequently, the external electrodes 7 and 8 are plated with nickel or
copper, to thereby form first plating layers 9. Finally, second plating
layers 10 formed of solder or tin are formed on the first plating layers
9, to thereby produce the monolithic ceramic capacitor 1.
The thus-produced monolithic ceramic capacitor 1 comprises the dielectric
ceramic layers 3 and 4 which are formed of the above-described dielectric
ceramic material.
In the dielectric ceramic material, the amount of a rare earth element
serving as an additional component, which is dispersed in the crystal
grains, is not particularly limited, and the amount may be regulated so as
to attain the desired characteristics of the ceramic material.
Dielectric characteristics of the dielectric ceramic material may be finely
regulated by varying the types and amounts of additives, which are added
to the material in very small amounts. For example, an Mn component, an Mg
component, a Ba component or a sintering accelerator predominantly
containing Si may be added to the material.
EXAMPLES
The dielectric ceramic material and the monolithic ceramic capacitor of the
present invention will next be described in more detail by way of
examples.
Barium carbonate (BaCO.sub.3), calcium carbonate (CaCO.sub.3), strontium
carbonate (SrCO.sub.3), titanium dioxide (TiO.sub.2), zirconium dioxide
(ZrO.sub.2), hafnium dioxide (HfO.sub.2) and barium titanate
(BaTiO.sub.3), serving as primary components and of a purity of 99.0% or
more, and dysprosium oxide (Dy.sub.2 O.sub.3), neodymium oxide (Nd.sub.2
O.sub.3), gadolinium oxide (Gd.sub.2 O.sub.3), erbium oxide (Er.sub.2
O.sub.3) and ytterbium oxide (Yb.sub.2 O.sub.3), serving as additional
components, were prepared. These compounds were weighed so as to attain
parts by mol shown in Table 1, water was added to the weighed compounds,
and the resultant mixture was wet-mixed by use of a ball mill for a time
shown in the column "mixing time" of Table 1. Subsequently, the resultant
mixture was dried through evaporation, to thereby obtain powder mixtures A
to W shown in Table 1.
The powder mixtures were thermally treated in a natural atmosphere at
calcination temperatures for retention times shown in Table 1, to thereby
obtain different species of modified BaTiO.sub.3 (hereinafter referred to
as "modified BT") containing a rare earth element in the form of a solid
solution.
TABLE 1
Amount of
Identity of Species of rare earth BaCO.sub.3 TiO.sub.2 BaTiO.sub.3
Other than Mixing Calcination
modified rare earth element added (parts by (parts by (parts BaCO.sub.3,
TiO.sub.2, time temperature Retention
BT element (parts by mol) mol) mol) by mol) and
BaTiO.sub.3 (hours) (.degree. C.) time
A Dy 0.1 100 100 None None
50 1050 5
B Dy 0.25 100 100 None None
50 1100 5
C Dy 0.5 100 100 None None
50 1125 5
D Dy 0.75 100 100 None None
50 1150 5
E Dy 0.5 100 100 None None
50 1050 5
F Dy 0.5 100 100 None None
50 1150 5
G Dy 0.5 100 100 None None
50 1200 5
H Dy 0.5 100 100 None None
50 1225 5
I Dy 0.5 None None 100 None
50 1100 5
J Dy 0.5 100 100 None None
5 1100 5
K Dy 0.5 100 100 None None
50 1100 0.5
L Dy 0.5 100 100 None None
50 1150 0.5
M Dy 0.5 100 100 None None
50 1000 5
N Dy 0.5 100 100 None None
50 1250 5
O Dy None None None 100 None
None None None
P Nd 0.5 100 100 None None
50 1175 5
Q Gd 0.5 100 100 None None
50 1150 5
R Er 0.5 100 100 None None
50 1125 5
S Yb 0.5 100 100 None None
50 1100 5
T Dy 0.5 95 100 None CaCO.sub.3
50 1150 5
(5 parts by
mol)
U Dy 0.5 99 100 None SrCO.sub.3
50 1150 5
(1 part by
mol)
V Dy 0.5 100 99 None ZrO.sub.2
50 1150 5
(1 part by
mol)
W Dy 0.5 100 99 None HfO.sub.2
50 1150 5
(1 part by
mol)
Subsequently, Dy.sub.2 O.sub.3, MnCO.sub.3, MgCO.sub.3 or SiO.sub.2 (amount
shown in Table 2) was added to each of the modified BTs shown in Table 1.
To the resultant mixture, a polyvinyl butyral organic binder and an
organic solvent such as toluene or ethyl alcohol were added, to thereby
prepare a slurry. The slurry was formed into a thin-layer ceramic green
sheet on an organic film through a doctor blade method such that the
thickness of the sheet became 3 .mu.m after firing.
Then, a conductive paste predominantly comprising nickel was applied to a
surface of the ceramic green sheets by way of printing so as to form a
conductive paste layer for constituting an internal electrode.
Thereafter, the ceramic green sheets having conductive paste layers were
laminated such that leading ends of the conductive paste layers on the
ceramic green sheet were arranged alternately. The resultant laminate was
sandwiched by ceramic green sheets having no conductive paste layer and
then pressed, to thereby obtain a green laminate.
Subsequently, the green laminate was heated at 350.degree. C. in a nitrogen
atmosphere to remove the binder, and fired at a temperature shown in Table
2 for two hours in a reducing atmosphere of H.sub.2 --N.sub.2 --H.sub.2 O
gas containing oxygen at a partial pressure of 10.sup.-9 to 10.sup.-12
MPa, to thereby obtain a sintered laminate.
Thereafter, a conductive paste containing B.sub.2 O.sub.3 --Li.sub.2
O--SiO.sub.2 --BaO glass frit and silver powder was applied to the surface
of each side of the sintered laminate, and the laminate was baked at
600.degree. C. in a nitrogen atmosphere so as to form external electrodes
electrically connected to the internal electrodes, to thereby produce a
monolithic ceramic capacitor of interest.
TABLE 2
Identity of Mean
Standard
modified BT Amount of additives Sintering grain
deviation of
Sample and (parts by mol) temperature size
grain size
No. mixing ratio Dy.sub.2 O.sub.3 MnCO.sub.3 MgCO.sub.3
SiO.sub.2 (.degree. C.) (.mu.m) (.mu.m)
1* J 100 parts by mol None 0.5 1.0 2.0 1275 0.30
0.07
2* O 100 parts by mol 0.5 0.5 1.0 2.0 1200 0.30
0.06
3* C 70 parts by mol None 1.0 1.0 2.0 1250 0.30
0.06
O 30 parts by mol
4* C 50 parts by mol None 1.0 1.0 2.0 1225 0.30
0.06
A 50 parts by mol
5.DELTA. K 100 parts by mol None 0.5 None 2.0 1200 0.30
0.18
6.DELTA. L 100 parts by mol None 1.0 None 2.0 1275 0.50
0.25
7.DELTA. M 100 parts by mol None 0.5 2.0 2.0 1150 0.04
0.01
8.DELTA. N 100 parts by mol None 0.5 None 3.0 1325 1.00
0.25
9 A 100 parts by mol None 0.5 1.0 2.0 1250 0.30
0.06
10 B 100 parts by mol None 0.5 1.0 2.0 1250 0.30
0.05
11 C 100 parts by mol None 1.0 1.0 2.0 1250 0.30
0.07
12 D 100 parts by mol None 1.0 1.0 2.0 1250 0.30
0.05
13 E 100 parts by mol None 0.5 2.0 2.0 1150 0.07
0.01
14 F 100 parts by mol None 0.5 1.0 2.0 1200 0.15
0.03
15 G 100 parts by mol None 1.0 None 2.0 1250 0.50
0.12
16 H 100 parts by mol None 1.0 None 2.0 1275 0.65
0.17
17 I 100 parts by mol None 0.5 1.0 2.0 1225 0.30
0.07
18 O 100 parts by mol 0.5 0.5 1.0 2.0 1300 0.30
0.06
19 C 95 parts by mol None 1.0 1.0 2.0 1225 0.30
0.06
O 5 parts by mol
20 P 100 parts by mol None 1.0 1.0 2.0 1250 0.30
0.07
21 Q 100 parts by mol None 1.0 1.0 2.0 1250 0.30
0.07
22 R 100 parts by mol None 1.0 1.0 2.0 1250 0.30
0.07
23 S 100 parts by mol None 1.0 1.0 2.0 1250 0.30
0.07
24 T 100 parts by mol None 1.0 1.0 2.0 1250 0.30
0.07
25 U 100 parts by mol None 1.0 1.0 2.0 1250 0.30
0.06
26 V 100 parts by mol None 1.0 1.0 2.0 1250 0.30
0.07
27 W 100 parts by mol None 1.0 1.0 2.0 1250 0.30
0.06
In Table 2 and in Tables 3 and 4 appearing below, samples marked with *
fall outside the scope of the present invention. In Tables 2 to 4, samples
marked with .DELTA. fall within the scope of the present invention but
outside the preferable scope of the invention. Namely, sample Nos. 1 to 4
fall outside the scope of the present invention and serve as comparative
examples. In contrast, sample Nos. 5 to 27 fall within the scope of the
present invention and serve as examples of the present invention. Of
these, sample Nos. 9 to 27 fall within the preferable scope of the present
invention.
In the monolithic ceramic capacitor produced as described above, the
dielectric ceramic layer was polished so as to become thin, and the layer
was observed under a transmission electronic microscope (TEM). The
observation revealed that in sample Nos. 5 to 27 (examples of the present
invention), there appears no core-shell structure in a crystal grain,
which structure is observed in a conventional ceramic microstructure.
From the monolithic ceramic capacitor of each sample, 20 crystal grains
were randomly chosen, and 10 portions were randomly chosen from each of
the crystal grains. The portions were subjected to measurement of the
amount of a rare earth element per unit volume (d.sub.ij)(i=1-20,j=1-10)
by means of energy-dispersive X-ray spectroscopy (EDX). The mean density
of the rare earth element in each of the 20 crystal grains (D.sub.i), the
standard deviation of the density of the rare earth element in each of the
20 crystal grains (S.sub.i) and the mean density of the rare earth element
in the entirety of the dielectric ceramic material (D) were calculated by
use of the following formulae.
##EQU1##
Subsequently, on the basis of the above-calculated D.sub.1, S.sub.1 and D
of the above-measured 20 crystal grains, there were obtained the number of
crystal grains satisfying the relation 0.5.ltoreq.D.sub.i /D and the
number of crystal grains satisfying the relations 0.5.ltoreq.D.sub.i /D
and S.sub.i /D.sub.i.ltoreq.0.3. In addition, the following ratios were
obtained: the ratio of the number of crystal grains satisfying the
relation 0.5.ltoreq.D.sub.i /D to the 20 crystal grains (M/N); and the
ratio of the number of crystal grains satisfying the relations S.sub.i
/D.sub.i.ltoreq.0.3 and 0.5.ltoreq.D.sub.i /D to that of crystal grains
satisfying the relation 0.5.ltoreq.D.sub.i /D (L/M) among the 20 crystal
grains. The results are shown in Table 3.
TABLE 3
Ratio of the
number of
Number of crystal grains crystal grains
satisfying
satisfying the relation Number of crystal grains the relation
0.5 .ltoreq. D.sub.i /D and
0.5 .ltoreq. D.sub.i /D among the 20 crystal satisfying the
relations S.sub.i /D.sub.i .ltoreq. 0.3 to that of crystal
Sample grains (percentage in parentheses 0.5 .ltoreq. D.sub.i /D and
S.sub.i /D.sub.i .ltoreq. 0.3 grains satisfying the relation
No. refer to the ratio (M/N)) among the 20 crystal grains 0.5 .ltoreq.
D.sub.i /D (L/M)
1* 17 (85%) 10 59%
2* 19 (95%) 14 74%
3* 13 (65%) 11 85%
4* 12 (60%) 11 92%
5.DELTA. 18 (90%) 15 83%
6.DELTA. 19 (95%) 16 84%
7.DELTA. 18 (90%) 15 83%
8.DELTA. 18 (90%) 16 89%
9 19 (95%) 18 95%
10 18 (90%) 16 89%
11 19 (95%) 16 84%
12 18 (90%) 17 94%
13 17 (85%) 14 82%
14 19 (95%) 16 84%
15 18 (90%) 17 94%
16 19 (95%) 16 84%
17 19 (95%) 18 95%
18 18 (90%) 15 83%
19 18 (90%) 15 83%
20 18 (90%) 16 89%
21 19 (95%) 16 84%
22 18 (90%) 15 83%
23 19 (95%) 17 89%
24 18 (90%) 15 83%
25 18 (90%) 17 94%
26 19 (95%) 16 84%
27 18 (90%) 16 89%
The monolithic ceramic capacitor of each sample was observed under a
scanning electron microscope (SEM) after exposure of the dielectric
ceramic layers. Through the observation, each of 300 randomly chosen
crystal grains was measured for grain size r.sub.i (i=1-300). The mean
grain size and the standard deviation of grain size were calculated by use
of the following formulae:
##EQU2##
##EQU3##
wherein, r refers to mean grain size.
The mean grain size and the standard deviation of grain size for each
sample are shown in Table 2.
As shown in Table 4, the monolithic ceramic capacitor of each sample was
evaluated for dielectric constant (.di-elect cons..sub.r), dielectric loss
(tan .delta.), the rate of change in capacitance with temperature,
specific resistance .rho. (log .rho.) and average life.
Specifically, in order to obtain dielectric constant, dielectric loss and
the rate of change in capacitance with temperature, capacitance was
measured according to JIS C5102 by use of an automatic bridge instrument.
The thus-measured capacitance served as the basis for calculation of
dielectric constant, dielectric loss and the rate of change in capacitance
with temperature.
Dielectric constant and dielectric loss were obtained for 20 capacitors of
each sample. The mean values of dielectric constant and dielectric loss
are shown in Table 4. The rate of change in capacitance with temperature
was obtained for four capacitors of each sample. The mean values thereof
are shown in Table 4.
Dielectric constant and dielectric loss were obtained on the basis of
capacitance measured at room temperature. The rate of change in
capacitance was obtained by use of capacitance measured within a
temperature range of -25.degree. C. to 85.degree. C. on the basis of
capacitance at 20.degree. C.
Specific resistance p was obtained as follows. A DC voltage was applied to
the capacitor at 20.degree. C. such that a DC voltage of 10 V was applied
to a dielectric ceramic layer of 1 .mu.m, insulation resistance of the
capacitor was measured 120 seconds after application of the voltage and
specific resistance .rho. (log .rho.) was calculated by use of the
thus-measured insulation resistance. This procedure was carried out for 20
capacitors of each sample. The mean values of specific resistance are
shown in Table 4.
The average life of the capacitor was measured through application of a DC
voltage at 150.degree. C. such that a DC voltage of 10 V was applied to a
dielectric ceramic layer of 1 .mu.m. The procedure was carried out for 36
capacitors of each sample. The time until short circuit occurred after
initiation of voltage application was regarded as the life. The average
life was obtained on the basis of the lives of 36 capacitors.
TABLE 4
Rate of change in
Dielectric capacitance with
Dielectric loss temperature Specific resistance .rho.
Average life
Sample constant tan .delta. .vertline..DELTA.C.sub.max
/C.sub.20.degree. C..vertline. log .rho. (150.degree. C., 10
V/.mu.m)
No. .epsilon..sub.r (%) (%) (.rho.: .OMEGA.
.multidot. cm) (hours)
1* 2980 1.9 6.9 12.1 7
2* 2750 1.2 7.5 12.1 4
3* 2500 1.1 12.1 11.0 1
4* 2720 1.3 11.1 11.3 8
5.DELTA. 3120 1.4 14.5 11.9 42
6.DELTA. 3450 1.7 15.3 11.4 71
7.DELTA. 1210 0.4 12.5 13.8 130
8A 4330 3.5 20.5 11.5 50
9 2570 1.2 6.5 13.1 51
10 3010 1.5 6.3 13.3 62
11 3230 1.6 6.1 13.5 73
12 3130 1.1 6.4 13.2 69
13 2020 0.5 4.5 13.9 101
14 2530 0.9 5.7 13.7 89
15 3430 1.9 7.1 13.1 52
16 3510 2.1 7.9 12.7 41
17 3170 1.4 7.2 13.0 69
18 3090 1.5 7.3 13.1 59
19 3120 1.4 6.8 13.2 52
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