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Flatness measuring equipment
   
Document Number
US Patent 6497047
Issued Date
December 24, 2002
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Abstract
The flatness measuring equipment can highly precisely measure flatness of a surface of a large-sized planar member, e.g., an abrasive plate. In the equipment, an elongated member is provided above and parallel to the surface of the planar member to be measured. A movable member is provided to the elongated member and capable of moving along the elongated member. A distance sensor, which is provided to the movable member, measures distance between the movable member and the surface of the planar member. A laser beam source emits a laser beam, at a fixed level, toward the movable member. A light receiving sensor detects a variation of a level of the movable member with respect of the fixed level of the laser beam.
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Flatness measuring equipment - US Patent 6497047 Drawing
Drawing from US Patent 6497047
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Number of Claims:
19
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Published
December 24, 2002
Application Number
09/517,836
Filed
March 2, 2000
US Classification
33/533   33/1BB 33/227
Int'l Classification
G01B   11/30   (20060101)  
Attorney/Law Firm
Priority Data
Mar 10, 1999 [JP] 11-063462
USPTO Field of Search
33/1BB   33/1CC   33/227   33/228   33/284   33/286   33/700   33/701   33/706   33/832   33/521   33/533   356/498   356/508   356/511   356/516   356/371   356/400  
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