A rod-shaped heater provided is composed of a carbon wire heating element 2 sealed in a small or large diameter quartz glass tube, a small diameter quartz glass tube portions 3a and 3b charged with compressed wire carbon members at opposite ends thereof; a sealed terminal section 10 having connection lines 11a and 11b for power supply held between the compressed wire carbon members charged in the small diameter quartz glass tube. The connection lines and the carbon wire heating element are electrically connected by way of the wire carbon members. This rod-shaped heater using the carbon wire heating element is suitable for readily raising the temperature of the agent in the storage tank of the wet etching agent or the grinding agent.
A material including a carbon-based substance and resins are mixed, and the mixture is extruded and dried, and the extrusion is sintered in an inert atmosphere, thereby obtaining a heating element material. The heating element material is reheated in a vacuum so that its resistance-temperature characteristic is adjusted to a necessary value, thereby obtaining a heating element for an infrared lamp. The heating element is a wire-shaped or plate-shaped heating element including the carbon-based substance, and an internal lead wire is wound around each of both ends of the heating element directly or via a graphite block so that a tight fit can be obtained. A coil spring is formed in the middle of the internal lead wire. The heating element is accommodated in a quartz glass tube filled with an inert gas.
A material including a carbon-based substance and resins are mixed, and the mixture is extruded and dried, and the extrusion is sintered in an inert atmosphere, thereby obtaining a heating element material. The heating element material is reheated in a vacuum so that its resistance-temperature characteristic is adjusted to a necessary value, thereby obtaining a heating element for an infrared lamp. The heating element is a wire-shaped or plate-shaped heating element including the carbon-based substance, and an internal lead wire is wound around each of both ends of the heating element directly or via a graphite block so that a tight fit can be obtained. A coil spring is formed in the middle of the internal lead wire. The heating element is accommodated in a quartz glass tube filled with an inert gas.
