A lateral shearing interferometer wavefront sensor system (10) that employs a double-shear/full aperture approach to correct for branch points in the wavefront of an optical beam (24) that has been aberated. The wavefront sensor system (10) includes a lateral shearing interferometer (12) having a beam splitter (14) that splits the beam (24) into a first split beam (28) and a second split beam (26), a beam shifter (22) that shifts the first split beam (28) relative to the second split beam (26), and a beam combiner (16) that combines first shifted split beam (28) and the second split beam (26) into a combined beam (30). The combined beam (30) provides an interference pattern that includes a plurality of interfered beam portions (76, 78, 82, 84). A deformable mirror (72) includes a plurality of actuators (74) which deform the mirror (72) to correct the beam wavefront. The interfered portions (76, 78, 82, 84) are twice the distance apart between actuators (74),or a double shear such that interfering portions (76, 78, 82, 84) do not align with branch cuts between the actuators (74).
A wavefront tilt measurement system for measuring the wavefront tilt of light passing through transmitting or receiving optical systems, the optical systems including a primary aperture and internal optical elements defining an optical system focal plane. A light source emits light at the optical system focal plane towards the internal optical elements such that light from the light source emerges from the primary aperture. A plurality of tilt sensors are disposed adjacent to the primary aperture to receive light emerging from the primary aperture. Each tilt sensor includes a sensor focal plane and a plurality of detector elements. Each tilt sensor generates at the focal plane a plurality of overlapping regions of zero and first order images of light emerging from the primary aperture. The measured intensity of light in the overlapping regions is used to determine the wavefront tilt of light emerging from the primary aperture.
An apparatus for detecting the surface profile of a test object includes a light source, a beam splitter, a reflective component, a sensor, and a computing device. The light source emits a light beam. The beam splitter divides the light beam into reference and probing beams. The reference beam is reflected by the reflective component back to the beam splitter. The reflective component is configured so that components of the reflected reference beam travel at different optical path lengths to the beam splitter. The probing beam is reflected by the test object back to the beam splitter. The beam splitter combines the reflected reference and probing beams to result in a heterodyne light beam. The sensor converts the heterodyne light beam into a corresponding electrical signal. The computing device records the converted electrical signal. A method for detecting the surface profile of the test object is also disclosed.
