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Surface inspecting apparatus and method therefor
 
   
Document Number
US Patent 6606394
Issued Date
August 12, 2003
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Abstract
A surface inspecting apparatus comprises an image achieving unit for achieving an image of a surface of an object; and a controller for providing the symmetry feature of the spot or contaminant by using the magnitude of the intensity gradient and the orientation of the intensity gradient for each pixel of the achieved surface image to thereby detect a spot or contaminant on the surface. The controller detects the spot or contaminant by using a symmetry magnitude map formed by the magnitude of the intensity gradient and the orientation of the intensity gradient of each pixel, after achieving the magnitude of the intensity gradient and the orientation of the intensity gradient by using a gradient operator on the achieved surface image, wherein the symmetry magnitude map provides the internal symmetry feature of the spot or contaminant.
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Surface inspecting apparatus and method therefor - US Patent 6606394 Drawing
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Number of Claims:
9
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Published
August 12, 2003
Application Number
09/475,119
Filed
December 30, 1999
US Classification
382/108  
Int'l Classification
G01N   21/88   (20060101)   G06T   7/00   (20060101)  
Examiner
Assistant Examiner
Attorney/Law Firm
Priority Data
Dec 09, 1999 [KR] 99-56196
USPTO Field of Search
382/141   382/143   382/144   382/108   382/145  
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