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Internal clock generating circuit for clock synchronous semiconductor memory device    

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United States Patent6636110   
Link to this pagehttp://www.wikipatents.com/6636110.html
Inventor(s)Ooishi; Tsukasa (Hyogo, JP); Sakashita; Narumi (Hyogo, JP)
AbstractTo input buffers included in a peripheral pad group inputting an external signal and a DQ pad group for data input/output, clock signals from a synchronizing circuit are transmitted through a clock distributing circuit having a plurality of clock transmission nodes arranged in a shape of a tree. The synchronizing circuit accomplishes phase synchronization between a signal from a node nearest to the clock distributing circuit with an external clock signal. Thus, a skew in clock signals applied to the input and output buffers can be eliminated.
   














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Drawing from US Patent 6636110
Internal clock generating circuit for clock synchronous semiconductor

     memory device - US Patent 6636110 Drawing
Internal clock generating circuit for clock synchronous semiconductor memory device
Inventor     Ooishi; Tsukasa (Hyogo, JP); Sakashita; Narumi (Hyogo, JP)
Owner/Assignee     Mitsubishi Denki Kabushiki Kaisha (Tokyo, JP)
Patent assignment
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Publication Date     October 21, 2003
Application Number     09/300,850
PAIR File History     Application Data   Transaction History
Image File Wrapper   Patent Term   Fees
Litigation
Filing Date     April 28, 1999
US Classification     327/565 327/295
Int'l Classification     H01L  025/00
Examiner     Callahan; Timothy P.
Assistant Examiner     Cox; Cassandra
Attorney/Law Firm     McDermott, Will & Emery
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Parent Case    
Priority Data     May 01, 1998[JP]10-122272
USPTO Field of Search     327/2 327/141 327/161 327/163 327/261 327/270 327/295 327/565
Patent Tags     internal clock generating circuit clock synchronous semiconductor memory
   
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What is claimed is:

1. A semiconductor circuit device, comprising:

clock generating circuitry for transmitting an internal clock signal synchronous with an externally applied external clock signal to a loop-shape clock transmission line having a forward path and a backward path, said loop-shape clock transmission line being divided into said forward path and said backward path at a returning point; and

a feedback path coupled to a middle point on the forward path of said loop-shape clock transmission line for feeding back the internal clock signal being transmitted over said forward path to said clock generating circuitry, signal propagation delay of said feedback path being substantially equal to signal propagation delay from the middle point of said forward path to said returning point;

said clock generating circuitry including a circuit for adjusting a phase of said internal clock signal such that the internal clock signal transmitted through said feedback path and said external clock signal are in phase with each other.

2. The semiconductor circuit device according to claim 1, further comprising:

a clock input buffer receiving said external clock signal for application to said clock generating circuitry; and

a replica buffer having a same configuration of said clock input buffer, provided on said feedback path for receiving the internal clock signal transmitted over said feedback path for application to said clock generating circuitry.

3. The semiconductor circuit device according to claim 1, further comprising:

a clock input circuit receiving said external clock signal for transmission to said clock generating circuitry; and

a replica circuit provided on said feedback path, having substantially the same signal transmission characteristic as said clock input circuit, for applying a signal applied through said feedback path to said clock generating circuitry.

4. The semiconductor circuit device according to claim 1, wherein said returning point is a point providing a propagation delay of substantially half a propagation delay of a whole of said loop-shape clock transmission line.

5. The semiconductor circuit device according to claim 1, wherein said loop-shape clock transmission line transmits a clock signal to a plurality of internal circuits, and said returning point is provided corresponding to one of said plurality of internal circuits, said one being physically the farthest from said clock generating circuitry.

6. The semiconductor circuit device according to claim 1, further comprising circuitry for generating a second internal clock signal by combining internal clock signals on a node on the forward path and a node on the backward path provided at mutually symmetrical positions with respect to said returning point.

7. The semiconductor circuit device according to claim 5, further comprising:

a plurality of first nodes provided on said forward path corresponding to said plurality of internal circuits;

a plurality of second nodes arranged at positions symmetrical to the respective first nodes with respect to said returning point; and

a plurality of clock reproducing circuits provided corresponding to pairs of the first and second nodes positioned at mutually symmetrical positions on said forward path and said backward path, for generating and applying to corresponding internal circuits second internal clock signals each having a central phase between internal clock signals of corresponding first and second nodes.

8. A semiconductor circuit device, comprising:

clock generating circuitry for generating a clock signal;

a plurality of internal circuits each operating in accordance with an applied clock signal, said plurality of internal circuits being arranged in a region between a first node of a minimum delay physically nearest to said clock generating circuitry and a second node of maximum delay physically farthest from said clock generating circuitry; and

a clock distributing circuit including (i) a plurality of nodes arranged in a form of a tree with a node corresponding to a middle point between the first and second nodes being a starring node, each node connected to clock transmission lines extending in mutually opposite directions and (ii) clock drivers arranged corresponding to respective nodes for transmitting an applied clock signals to corresponding clock transmission lines, for transmitting the clock signal from said clock generating circuitry to said plurality of internal circuits, wherein said clock generating circuitry includes:

a clock buffer circuit for receiving an externally applied external clock signal to produce a first internal clock signal according to the external clock signal;

a phase comparator for comparing in phase the first internal clock signal and a feedback clock signal fed back from the clock distributing circuit;

a delay stage for delaying a received clock for outputting;

a delay control circuit according to an output signal of said phase comparator for adjusting a delay amount of said delay stage such that a phase difference between the first internal clock signal and the feedback clock signal becomes substantially zero;

a frequency divider for receiving a middle signal having a delay amount of half a whole delay amount of said delay stage from said delay stage to frequency-divide the middle signal by a predetermined factor,

a first selector responsive to a first selecting signal for selecting one of said first internal clock signal and said middle signal for application to said delay stage; and

a first selecting circuit responsive to an operation mode designating signal for selecting one of an output signal of said frequency-divider and an output of said delay stage to generate a second internal clock signal as said clock signal.

9. The semiconductor circuit device according to claim 8, wherein said clock generating circuitry further includes

a second selector for selecting one of said middle signal and the output signal of the delay stage in accordance with a second selecting signal;

a third selector for selecting one of the first internal clock signal and an output signal of said second selector for application to internal circuitry as a timing control signal.

10. The semiconductor circuit device according to claim 8, wherein said first selecting circuit includes

a second selector for selecting one of an output signal of said delay stage and an output signal of said frequency-divider in accordance with a second selecting signal included in said operation mode designating signal, and

a third selector for selecting one of an output signal of said second selector and said first internal clock signal in accordance with a third selecting signal included in said operation mode designating signal.

11. The semiconductor circuit device according to claim 8, further comprising

a replica buffer for providing the feedback clock signal with a delay substantially the same as a delay of said first internal clock signal relative to the external clock signal.

12. The semiconductor circuit device according to claim 8, wherein said feedback clock signal is fed back from a node physically nearest to said clock generating circuitry among said plurality of nodes.

13. The semiconductor circuit device according to claim 8, wherein said clock generating circuitry further comprises

a pulse generator responsive to a transition of said first internal clock signal for generating a one-shot pulse signal, and

a phase synchronizing circuit for successively delaying said one shot pulse signal to select a delayed one shot pulse signal locked in phase with the one-shot pulse signal for outputting as another clock signal.

14. A semiconductor device comprising:

an internal clock generating circuitry for generating an internal clock signal in accordance with an external clock signal;

a clock tree arranged on a common semiconductor substrate on the internal clock generating circuitry and including a plurality of nodes for distributing the internal clock signal from a starting point to terminal points;

an internal control signal generator provided corresponding to a terminal point of said plurality of terminal points and responsive to a clock signal at the terminal point for generating an internal control signal for controlling an internal operation;

said internal clock generating circuitry receiving a clock signal at a predetermined terminal point of the terminal points to adjust a phase difference between the external clock signal and the received clock signal for generating said internal clock signal.

15. The semiconductor device according to claim 14, wherein said internal clock signal is transmitted from a minimum delay point to a maximum delay point, said starting point is at a middle point between said maximum delay point and said minimum delay point, said nodes of the clock tree are arranged in a plurality of stages, and each stage includes a branching node for a starting node to a succeeding stage, said branching node being located at a middle point between a corresponding starting node and the maximum delay point.

16. The semiconductor device according to claim 14, wherein said internal clock generating circuitry includes a clock buffer for receiving and buffering the externally applied external clock signal, and an internal clock generator receiving an output clock signal to generate said internal clock signal,

said internal clock generator receives the clock signal through a replica circuit having a common transmission characteristics as said clock buffer to compare the received clock signal and the output clock signal received from the clock buffer.

17. The semiconductor device according to claim 14, wherein the node of the each stage of said clock tree is provided with a clock driver for buffering a received clock signal.

18. The semiconductor device according to claim 14, further comprising an internal signal latch circuit for latching an externally applied input signal in response to said internal control signal.

19. The semiconductor device according to claim 18, wherein said internal clock signal generating circuitry includes a feedback circuit having a same transfer characteristics as a signal transmission delay from the terminal point to a corresponding internal signal latch circuit, for transferring the clock signal at the predetermined terminal point, and an internal clock generating circuit receiving the external clock signal and an output clock signal from the feedback circuit for adjusting a phase difference between the external clock signal and the receiver output signal to generate the internal clock signal.

20. A semiconductor memory device comprising:

signal input circuitry for receiving an input signal and generating an internal signal;

latch circuitry for receiving and latching said internal signal; and

control signal generating circuitry for generating an input control signal controlling taking in of said input signal by said input circuitry and a latch control signal controlling latching operation of said latch circuitry in accordance with a basic signal, said control signal generating circuitry including an adjusting circuit for compensating for a time difference between taking in of said input signal by said input circuitry and latching of said internal signal by said latch circuitry,

wherein said adjusting circuit comprises delay circuitry for delaying said input control signal, by a time period corresponding to a signal propagation time of said internal signal from said input circuitry to said latch circuitry, to generate said latch control signal.

21. A semiconductor memory device comprising:

signal input circuitry for receiving an input signal and generating an internal signal;

latch circuitry for receiving and latching said internal signal; and

control signal generating circuitry for generating an input control signal controlling taking in of said input signal by said input circuitry and a latch control signal controlling latching operation of said latch circuitry in accordance with a basic signal, said control signal generating circuitry including an adjusting circuit for compensating for a time difference between taking in of said input signal by said input circuitry and latching of said internal signal by said latch circuitry,

wherein said adjusting circuitry comprises a delay circuit for adjusting a phase difference between said input control signal and said latch control signal.

22. A semiconductor device comprising:

adjusting circuitry for adjusting a phase difference between an external clock signal applied to an external clock input node and a feed back internal clock signal at a feed back clock node fed back from a predetermined internal clock mode receiving an internal clock signal, and generating a reference internal clock signal and a pro-external clock signal; and

internal clock generating circuitry for generating said internal clock signal synchronized with said external clock signal in accordance with said reference clock signal and said pro-external clock signal;

said adjusting circuitry adjusting said phase difference such that a propagation delay of the external clock signal between the external clock input node and an input of said internal clock generating circuitry is made equal to a propagation delay of the feed back clock signal between the predetermined internal clock node and the input of the internal clock generating circuitry.

23. The semiconductor device according to claim 22, wherein said adjusting circuitry comprises:

an external clock buffer circuit for buffering said external clock signal applied to said external clock input node to generate said pro-external clock signal, and

an internal clock buffer circuit being the same in configuration and size with said external clock buffer and arranged between said feed back clock signal input node and an input of said internal clock signal generating circuitry, for buffering said feed back internal clock signal.

24. The semiconductor device according to claim 23, further comprising a delay circuit formed of an interconnection line patterned into a predetermined layout form and connected between said internal clock buffer circuit and said input of said internal clock signal generating circuitry.

25. The semiconductor device according to claim 23, wherein said internal clock generating circuitry comprises, at said input, a phase comparison circuit for comparing phases of received clock signals.

26. The semiconductor device according to claim 22, wherein

said predetermined internal clock node is a node on an internal clock signal transmitting line transmitting said internal clock signal from said internal clock signal generating circuitry to internal circuitry, and

said internal clock is fed back through a feed back line connected between said predetermined internal clock node and said feed back clock node and arranged separately from said internal clock signal transmitting line.

27. The semiconductor device according to claim 26, wherein said predetermined internal clock node is a node at a mid-point between a physically farthest point from said internal clock signal generating circuitry of said internal clock transmitting line and said internal clock signal generating circuitry.
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BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a semiconductor circuit device and, more specifically, to a configuration for distributing an internal clock signal in a circuit device operating in synchronization with the clock signal. More specifically, the present invention relates to a configuration for distributing an internal clock signal in a clock synchronous semiconductor memory device in which taking of an external signal and data and output of data are performed in synchronization with an externally applied clock signal.

2. Description of the Background Art

FIG. 32 schematically represents an overall configuration of a convention al clock synchronous semiconductor memory device. Referring to FIG. 32, the clock synchronous semiconductor memory device includes a memory array 900 having a plurality of memory cells arranged in a matrix of rows and columns; a synchronizing circuit 902 receiving an externally applied clock signal EXCLK and generating an internal clock signal INCLK synchronized with the external clock signal EXCLK; an address input circuit 904 taking in an externally applied address signal AD in synchronization with the internal clock signal INCLK from synchronizing circuit 902 and generating an internal address signal; a control signal input circuit 906 taking an external command .PHI.C in synchronization with the internal clock signal INCLK and generating an internal control signal; a control circuit 908 generating various control signals necessary for a designated operation mode in accordance with the internal control signal from control signal input circuit 906; a cell selecting circuit 910 operating under the control of control circuit 908, and selecting a memory cell in memory cell array 900 in accordance with the internal address signal applied from address input circuit 904; and a data input/output circuit 912 operating under the control of control circuit 908 and performing data input/output to and from the memory cell selected by cell selecting circuit 910 in synchronization with internal clock signal INCLK.

The command signal .phi.C includes a plurality of external control signals such as a row address strobe signal ZRAS, a column address strobe signal and a write enable signal ZWE, and by a combination of states of the plurality of external control signals at a rising edge of the internal clock signal INCLK, a command designating an operation mode is formed.

FIG. 33 is a timing chart representing an operation of the clock synchronous semiconductor memory device shown in FIG. 32. In the following, the operation of the clock synchronous semiconductor memory device shown in FIG. 32 will be described with reference to FIG. 33.

In a cycle preceding a cycle #a of external clock signal EXCLK, an active command is applied and in memory array 900, memory cells corresponding to an addressed row are driven to and held at a selected state.

In the clock cycle #a, the command signal .phi.C is set to a prescribed state, and a write command designating a data write is applied. In the clock cycle #a, in synchronization with a rise of external clock signal EXCLK, address input circuit 904 takes in the external address signal AD and generates an internal address signal. Data input/output circuit 912 takes in externally applied write data d0 in synchronization with the external clock signal EXCLK in accordance with the write command. Cell selecting circuit 910 selects a memory cell in accordance with the address signal applied from address input circuit 904.

In successive clock cycles starting at clock cycle #a, write data d1, d2 and d3 are taken in, respectively in synchronization with the rise of the external clock signal EXCLK. The write data d0 to d3 are written to memory cells selected by the cell selecting circuit 910 of memory array 900 in a prescribed sequence. The number of data written or read successively when a command is applied is referred to as a burst length. FIG. 33 represents an example of a data writing operation when the burst length is 4.

In a cycle #b of external clock signal EXCLK, the command signal .phi.C is set to a prescribed state and a read command designating a data read is applied. In accordance with the read command, address input circuit 904 takes in an external address signal AD in synchronization with a rise of external clock signal EXCLK and generates an internal address signal. Cell selecting circuit 910 selects an addressed memory cell of memory array 900, and data of the selected memory cell is applied to data input/output circuit 912. A certain time period is necessary from the selection of the memory cell by cell selecting circuit 910 until transfer of data of the selected memory cell to data input/output 912. In a cycle preceding the cycle #c of external clock signal EXCLK, valid data is output from data input/output circuit 912, the read data q0 is established at a rising edge of external clock signal EXCLK in the clock cycle #c and sampled by an external device. Thereafter, data of the burst length are read in synchronization with the external clock signal EXCLK successively. The clock cycle period from clock cycle #b to clock cycle #c is generally referred to as CAS latency, and FIG. 33 represents an example of a reading operation where CAS latency is 3.

In a clock synchronous semiconductor memory device such as the one shown in FIG. 32, the external address signal and the command signal are taken in synchronization with external clock signal EXCLK (internal clock signal INCLK). Therefore, it is unnecessary to consider any skew between control signals, and a timing of starting an operation of the internal circuit can be made advanced, enabling high speed access.

Further, since data input/output is also in synchronization with the external clock signal EXCLK, data transfer rate is effectively the same as the rate of the external clock signal EXCLK, and therefore high speed data transfer is realized.

Synchronizing circuit 902 generates the internal clock signal INCLK which is synchronous with the externally applied clock signal EXCLK, and determines the timing of taking signals of address input circuit 904 and control signal input circuit 906. Therefore, in address input circuit 904 and control signal input circuit 906, taking of accurate external signals and generation of internal signals at a faster timing are possible. Further, in data input/output circuit 912, it is possible to input/output data in accordance with the external clock signal EXCLK, and therefore accurate data input/output and high speed data transfer can be realized.

FIG. 34A represents a schematic configuration of the synchronizing circuit shown in FIG. 32. Synchronizing circuit 902 shown in FIG. 34A is formed by a synchronizing circuit having a feed back loop such as a phase locked loop (PLL). Synchronizing circuit 902 adjusts phase of the internal clock signal INCLK such that the externally applied external clock signal EXCLK and the internal clock signal INCLK come to have the same phase. Therefore, as can be seen from FIG. 34B, the internal clock signal INCLK is in phase with the external clock signal EXCLK.

The external control signal and the address signal are generated with the external clock signal EXCLK being a reference. Therefore, in the semiconductor memory device, the command signal .phi.C has extremely small skew with respect to the external clock signal EXCLK (with the direction of signal transfer being the same), and therefore sufficient set up time Ts and sufficient hold time Th are ensured. It should be noted, however, that though synchronizing circuit 902 has a function of making the phase of internal clock signal INCLK matched with external clock signal EXCLK, synchronizing circuit 902 does not have a function of adjusting skew generated n the internal clock signal INCLK is transmitted inside the semiconductor memory device.

FIG. 35A schematically shows a manner of distribution of the internal clock signal from synchronizing circuit 902. In FIG. 35A, the internal clock signal from synchronizing circuit 902 is transmitted to input circuits #ai, #bi and #ci through respective clock transmission lines (signal lines) L1, L2 and L3. The clock transmission lines L1, L2 and L3 have different line capacitances and different line resistances, and hence different signal propagation delays. In FIG. 35A, internal clocks INCLKa, INCLKb and INCLKc are shown respectively to be transmitted to clock transmission lines L1, L2 and L3 from synchronizing circuit 902. Clock transmission lines L1, L2 and L3 have larger signal propagation delays in this order. Input circuit #ai to #ci may be any of input circuits 904, 906 and 912 shown in FIG. 32.

FIG. 35B schematically represents timing relation between the clock signals shown in FIG. 35A and a signal SIG applied to the input circuit. In FIG. 35B, in a cycle #ca of the external clock signal EXCLK, the signal SIG is applied. At this time, when time difference between internal clock signal INCLKa, INCLKb and INCLKc is small and the clock skew is small, it is possible to take the signal SIG into respective input circuits #ai to #ci at a rising edge of external clock signal EXCLK to generate internal signals. The signal SIG represents a group of signals applied to input circuit #ai to #ci, respectively. In this case, however, it is necessary to determine the timing of starting an internal operation, taking into consideration the clock skew, and therefore the timing of starting an internal operation is delayed. If the hold time of the signal SIG is insufficient, it becomes impossible to generate a correct internal signal.

When the external clock signal EXCLK is a high speed clock signal (having high frequency) as represented by the cycle #cb of the external clock signal EXCLK in FIG. 35B, time difference between signal clock signals INCLKa to INCLKc is relatively large, and when the clock skew is large, the signal SIG which is to be taken in at a rising edge of the external clock signal EXCLK cannot be taken with the internal clock signal INCLKc applied to input circuit #ci. Therefore, when the clock skew is large, it is impossible to execute the designated operation. Accordingly, the operation frequency of the semiconductor memory device is determined by the clock skew, which means that high speed operation is not possible. More specifically, when the clock skew occupies a major part of the cycle time of the external clock signal, accurate operation becomes impossible, and hence the operation frequency of the semiconductor memory device is significantly limited by the clock skew.

FIG. 36A schematically represents a configuration of a data output portion of data input/output circuit 912 of FIG. 32. Referring to FIG. 36A, there are a plurality of data output circuits OB#0 to OB#n provided parallel to each other. To these data output circuits OB#0 to OB#n, internal clock signal INCLK is transmitted through a clock transmission line L4 from synchronizing circuit 902. Data output circuits OB#0 to OB#n transfer and output data in synchronization with an internal clock signal INC (INC0 to INCn) applied through clock transmission line L4. There is also a clock skew derived from difference in line length in clock transmission line L4.

FIG. 36B is a timing chart representing an operation of the data output portion of FIG. 36A. Data output circuit OB#0 is nearest to synchronizing circuit 902, clock transmission line L4 thereto is the shortest, and the delay of internal clock signal INC0 with respect to external clock signal EXCLK is the smallest. Data output circuit OB#n is farthest from synchronizing circuit 902, clock transmission line L4 thereto is the longest, and propagation delay is the largest.

Data output circuits OB#0 to OB#n transfer and output data in synchronization with the applied internal clock signals INC0 to INCn at the time of a data read. Therefore, data Q0 output from data output circuit OB#0 attains to the established state at the earliest timing, while data Qn output from data output circuit OB#n attains to the established state at the latest timing.

Accordingly, data output timings of data output circuits OB#0 to OB#n delay because of the delays in internal clock signals INC0 to INCn, and therefore set up times of data Q0 to Qn with respect to the external clock sign al EXCLK become shorter by the delay times of the internal clock signals, and hence output data come to have smaller margins (as the external device samples data at the rising edge of external clock signal EXCLK).

As represented by the dotted line for the data Qn in FIG. 36B, when the clock skew becomes so large that the timing of establishment of data Qn becomes later than the rising edge of the external clock signal EXCLK, accurate data reading is impossible. Therefore, in the data output operation also, operation frequency of data output is determined by the clock skew over the clock transmission line L4, that is, delay time difference among internal clock signals INC0 to INCn. Especially in recent semiconductor memory devices, multiple bits of data such as 16 bits are output, which means that there are larger number of data output circuits OB#0 to OB#n, and hence clock skew over clock transmission line L4 tends to be larger, resulting in the problem that accurate data output in synchronization with the high speed clock signal becomes difficult.

FIG. 37 represents another configuration of a conventional semiconductor memory device. Referring to FIG. 37, in synchronization with the internal clock signal INCLK from synchronizing circuit 920, internal circuits NK#0 to NK#n operate. It is not necessary for these internal circuits NK#0 to NK#n to execute the same processing contents. What is necessary is that in the configuration, prescribed processings are performed, with the operation cycle defined by the internal clock signal INCLK applied through clock transmission line LK. In other words, the semiconductor circuit device may be a general arithmetic processing device.

In such a semiconductor circuit device as shown in FIG. 37 also, the internal clock signal INCLK is transmitted from synchronizing circuit 920 over clock transmission line LK to internal circuits NK#0 to NK#n. Among internal circuits NK#0 to NK#n, the are exists one internal circuit which receives the internal clock signal with minimum delay amount, and one internal circuit which receives the internal clock signal with maximum delay amount. Therefore, in this case also, it is necessary to operate internal circuits NK#0 to NK#n, taking into account the skew of internal clock signal INCLK transmitted over clock transmission line L5, and therefore there is the problem that high speed operation is not possible.

Especially when the semiconductor circuit device is implemented in large scale and the number of circuits connected to clock transmission lines L1 to L5 increases, the load on the clock transmission lines increases accordingly, signal propagation delay over the clock transmission lines increases, and the problem of clock skew becomes more serious. In order to solve the problem of clock skew experienced in the semiconductor circuit devices such as shown in FIGS. 35A, 36A and 37, a configuration have been proposed in which dummy delays for adjusting delay times are arranged in accordance with the amounts of respective clock delays.

FIG. 38 represents an example of a counter measure against clock skew in the conventional semiconductor circuit device. In FIG. 38, internal circuitry is divided into a plurality of internal circuit groups NG#0 to NG#m. For internal circuit groups NG#0 to NG#(m-1), dummy delays DDL#0 to DDL#(m-1) for adjusting delay time are arranged. The internal clock signal INCLK from synchronizing circuit 925 is transmitted over a clock transmission line L6, the internal clock signal is transmitted to internal circuit groups NG#0 to NG#(m-1) through corresponding dummy delays DDL#0 to DDL#(m-1), respectively, and to internal circuit group NG#m, internal clock signal INCLK from clock transmission line L6 is transmitted.

Each of dummy delays DDL#0 to DDL#(m-1) is constituted by an RC delay circuit having a resistor and a capacitor, or a delay circuit employing an inverter, and adapted to have such a delay amount that compensates for the delay time over clock transmission line L6. More specifically, the delay timed of dummy delay DDL#0 provided corresponding to internal circuit group NG#0 provided at a point of minimum delay has approximately the same magnitude as the clock delay derived from a load accompanying the overall clock delay line L6. By contrast, the amount of delay of dummy delay DDL#(m-1) is set to compensate for the delay experienced by the internal circuit group NG#m, which is the maximum amount of delay.

In each of the internal circuit groups NG#0 to NG#m, there are a plurality of internal circuits to which an internal clock signal is applied in common.

In the configuration shown in FIG. 38, it is necessary to provide dummy delays DDL#0 to DDL#(m-1) for internal circuit group NG#0 to NG#(m-1). Accordingly, larger area is occupied by the circuit portion for transmitting the clock signal, which hinders higher degree of integration.

Though dummy delays DDL#0 to DDL#(m-1) are set to have such delay times that compensate for the delay time on the later stage (down stream) side of clock transmission line L6, it is difficult to set an accurate delay time, and it is difficult to provide internal clock signals of the same phase accurately to internal circuit groups NG#0 to NG#m. Further, in each of internal circuit groups NG#0 to NG#m, the applied internal clock signal is distributed to internal circuits contained therein. Here, propagation delay of the clock to each of the internal circuits is not constant, and therefore in each of the internal circuit groups NG#0 to NG#m, there exists clock skew among the internal circuits contained therein.

Further, the problem of lower operation frequency resulting from the skew in internal clock signal described above is experienced not only in the semiconductor integrated circuit device integrated on a single semiconductor chip but also in a configuration in which a plurality of integrated circuit devices are arranged on a board, as the timing of operation of each semiconductor integrated circuit device is offset because of the signal propagation delay over the lines on the board.

SUMMARY OF THE INVENTION

An object of the present invention is to provide a semiconductor circuit device free from any internal clock signal skew.

Another object of the present invention is to provide a semiconductor circuit device provided with a clock distributing circuit allowing application of internal clock signals in phase with each other to various internal circuits.

The semiconductor circuit device in accordance with a first aspect includes a clock generating circuit for generating a clock signal, and a plurality of internal circuits operating in accordance with received clock signals. The plurality of internal circuits are arranged between a first node of a minimum delay physically nearest to the clock generating circuit, and a second node of a maximum delay physically the farthest from the clock generating circuit.

The semiconductor circuit device in accordance with the first aspect further includes a clock distributing circuit having a plurality of nodes arranged in a shape of a tree with a node corresponding to a middle point between the first and second nodes being a starting node, and connected to clock transmission lines extending in opposite directions, and clock drivers arranged corresponding to respective nodes for transmitting the clock signals applied to the corresponding nodes to the corresponding clock transmission lines. The clock distributing circuit transmits the clock signal from the clock generating circuit to the plurality of internal circuits.

The semiconductor circuit device in accordance with a second aspect includes a clock generating circuit for generating a clock signal, and a clock distributing circuit for distributing the clock signal of the clock generating circuit from a nearest point physically nearest to the clock generating circuit to a region providing a farthest point physically the farthest therefrom. The distributing circuit has a plurality of nodes arranged in the shape of a tree, with a middle point between the nearest and the farthest points as a starting node. To each node, a driver for transmitting the applied signal and signal transmission lines extending in directions opposite to each other, having substantially the same delay and receiving the signal from the driver, are connected. The delay of the signal transmission line is monotonously decreased nearer to the distal end of the tree.

The semiconductor circuit device in accordance with a third aspect includes clock generating cir