An optical metrology system for measuring a contour of a workpiece surface. The system includes a multi-wavelength light projector that projects a wavelength-varying collimated light beam onto the surface of the workpiece. The collimated light beam has a plurality of substantially parallel light rays, each of which has a predetermined wavelength. The wavelength of the plurality of light rays varies in a predetermined manner across a width of the collimated light beam. A wavelength-discriminating detector determines an intensity of light reflected from the workpiece surface and detects wavelength-specific characteristics of the received reflected light. Significantly, the wavelength-specific characteristics of the reflected light are related to the distance of the workpiece surface from the detector. Specifically, the multi-wavelength projector includes a collimated light source that generates a collimated light beam. A wavelength filter in the multi-wavelength projector is operatively positioned adjacent to the collimated light source to filter predetermined wavelengths of certain ones of said plurality of light rays to generate the wavelength-varying collimated light beam. The wavelength discriminating detector includes a photodetector matrix having a plurality of photosensitive elements forming an array of wavelength-sensitive light detector elements. A light receiver of the wavelength discriminating detector projects light reflected from one or more predetermined locations on the workpiece surface onto the photodetector matrix such that wavelength-specific characteristics and intensity information of the reflected light is recorded by the photodetector matrix.
A surface inspection apparatus of the present invention includes an irradiation optical unit having a multibeam irradiation optical unit for converging and irradiating multiple beams upon a surface of an object to be inspected; a detector which has a light-condensing optical unit including light-sensitive elements for respectively receiving the multiple beams reflected by the surface of the inspecting object; and a processor which obtains a plane-coordinate-position of a position to be irradiated and detected at a reference height position based on a difference between light-receiving reference positions of each of the light-sensitive elements when assumed that the irradiated and detected position of the inspecting object is at the reference height position and actual light-receiving positions of each of the light-sensitive elements, according to a result of analysis and process of surface state information.
A three-dimensional imaging method and system illuminates an object to be imaged with a light pattern that is formed from two or more light sub-patterns. The sub-patterns can each encompass the visible light spectrum or can be spatially varying intensity sub-patterns that each correspond to a red, green, or blue component. The light pattern is generated by a slotted planar member or an optical filter.
According to an embodiment, a method and system for color calibration in a three-dimensional multi-color laser scanning system is disclosed. An object may be scanned with the scanning system, which scans the object with color laser heads. Laser intensities, corresponding to laser intensity values, may be received from the scanned object. Three different calibration targets are used to setup a field of view (FOV) calibration profile due to scanning position changes, a surface normal calibration profile due to surface normal direction changes, and a color reflectance calibration profile due to color reflectance changes. After compensating for laser power drift fluctuations, the laser intensity values may be further compensated for field of view scanning position changes and surface normal direction changes using the field of view calibration profile and surface normal calibration profile. Color values of each point scanned from the object may be calculated using compensated laser intensity values from the color reflectance profile.
The application of microstructures which improve the quality of light available to the viewer of an optical display system, or any display which works on the concept of moving one surface into direct contact or close proximity of a light guide to extract light through frustrated total internal reflection. Optical microstructures are introduced on one or both of the surfaces of the active layer to enhance its performance. Since the active layer has both an input and an output function, means for enhancing both are presented. The input function to the active layer occurs on the internal surface, so this is where the present invention adds a collector-coupler, a means for facilitating the migration of light from the waveguide into the active layer. The output function occurs on the external surface, where the present invention adds a collimator, a means for both increasing the probability that a light wave will be released from the active layer, and improving the apparent intensity by redirecting light waves so that more of them reach the viewer. Compound microlenses on the internal surface of the active layer can serve as both collector-couplers and collimators, substantially improving light extraction from the light guide and light distribution to the viewer. Depositing a reflective or colored material in the interstitial spaces between these compound microlenses improves the contrast ratio and mitigate pixel cross-talk. The opaque material can be conductive for use in actuating the display.
