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Lower electrode isolation in a double-wide trench
   
Document Number
US Patent 6646297
Issued Date
November 11, 2003
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Abstract
The invention relates to a phase-change memory device. The device includes a double-wide trench into which a single film is deposited but two isolated lower electrodes are formed therefrom. Additionally a diode stack is formed that communicates to the lower electrode. Additionally, other isolated lower electrodes may be formed along a symmetry line that is orthogonal to the first two isolated lower electrodes. The present invention also relates to a method of making a phase-change memory device. The method includes forming two orthogonal and intersecting isolation structure s around a memory cell structure diode stack.
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Number of Claims:
19
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Owner
Ovonyx, Inc. (Boise, ID)
Published
November 11, 2003
Application Number
09/749,127
Filed
December 26, 2000
US Classification
257/296   257/298 257/E27.004
Int'l Classification
H01L   27/24   (20060101)  
Examiner
Assistant Examiner
Attorney/Law Firm
USPTO Field of Search
257/296   257/298  
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