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Method for examination of a surface layer
   
Document Number
US Patent 6656678
Issued Date
December 2, 2003
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Abstract
In a method for examination of the surface of an object for a topographic and/or a chemical property, the object-surface is impinged with surface-structure selective biocomponents for examination of a topographic property and/or with chemoselective biocomponents for the examination of a chemical property, together with a nutrient medium and/or an osmotic protective medium for the biocomponents. The biocomponents contained in the nutrient medium and/or the osmotic protective medium are in contact with the object-surface or are spaced from the object surface by less than the detection range of the biocomponents. The object surface is then examined with the biocomponents contained in the nutrient medium and/or the osmotic protective medium by determining at least one examination measurement value. The examination measurement value is compared with a reference measurement value, and conclusions can be drawn about the topographic and/or chemical properties of the object from the result of the comparison. Using the method, an object surface can be examined for a topographic and/or chemical property in a simple manner with a high measuring sensitivity.
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Number of Claims:
11
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Owner
Micronas GmbH (Freiburg,DE)
Published
December 2, 2003
Application Number
09/585,146
Filed
June 1, 2000
US Classification
435/4   257/E21.527 436/518
Int'l Classification
G01B   11/30   (20060101)   G01N   21/94   (20060101)   G01N   21/88   (20060101)   H01L   21/66   (20060101)  
Examiner
Parent Case
CROSS-REFERENCE TO RELATED APPLICATION This application is a continuation of International Application No. PCT/EP98/07597 filed Nov. 25, 1998 the disclosure of which is incorporated herein by reference.
Priority Data
Dec 04, 1997 [DE] 197 53 790
USPTO Field of Search
436/518   435/4  
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