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Multimode planar spectrographs for wavelength demultiplexing and methods of fabrication
   
Document Number
US Patent 6657723
Issued Date
December 2, 2003
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Abstract
A planar spectrograph for demultiplexing optical wavelength signals includes a monolithic substrate. The substrate has a diffraction grating etched therein. The diffraction grating is integrally formed in the substrate to be in operative relationship with input light to diffract and reflect the input light to a detector. A recess is formed in the substrate to accommodate a separate slab waveguide. A slab waveguide is dimensioned and configured to fit within the recess, and the waveguide guides input light to and from the diffraction grating. A silicon-on-insulator spectrographs is also described, as well as, fabrication processes for manufacturing these spectrographs.
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Number of Claims:
34
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Published
December 2, 2003
Application Number
09/736,006
Filed
December 13, 2000
US Classification
356/328   385/14
Int'l Classification
G01J   3/28   (20060101)  
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Assistant Examiner
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USPTO Field of Search
356/328   385/14  
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