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Document Number
US Patent 6670639
Issued Date
December 30, 2003
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Abstract
The present invention relates to a copper interconnection comprising a copper or copper alloy layer, wherein at least 50% of crystal grains of copper or a copper alloy form twins. A copper interconnection of the present invention is, therefore, highly reliable, and, a production cost thereof is low.
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Number of Claims:
5
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Owner
NEC Corporation (Tokyo,JP)
Published
December 30, 2003
Application Number
10/009,869
Filed
December 11, 2001
US Classification
257/64   257/E23.161
Int'l Classification
H01L   23/52   (20060101)   H01L   23/532   (20060101)  
Examiner
Assistant Examiner
Priority Data
Jun 22, 1999 [JP] 11-175564
USPTO Field of Search
257/64   257/49  
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Description
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