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Organoindium compounds
   
Document Number
US Patent 6680397
Issued Date
January 20, 2004
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Abstract
Disclosed are trialkylindium compounds containing two bulky alkyl groups that are liquids or easily liquefiable solids and have sufficient vapor pressure for use in vapor deposition processes, as well as methods of depositing indium containing films using such compounds.
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Number of Claims:
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Owner
Shipley Company, L.L.C. (Marlborough, MA)
Published
January 20, 2004
Application Number
10/346,585
Filed
January 17, 2003
US Classification
556/1   427/252 427/593 438/680 438/681
Int'l Classification
C23C   16/30   (20060101)   C07F   5/00   (20060101)   C07F   5/06   (20060101)  
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Parent Case
This application claims the benefit of U.S. Provisional Application(s) No(s). 60/349,726 filed Jan. 17, 2002 and 60/395,169 filed Jul. 11, 2002.
USPTO Field of Search
556/1   427/252   427/593   438/681   438/680  
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Organometallic compounds of Group IIB and IIIA metals that are substantially pure and contain low levels of oxygenated impurities are provided. Also provided are methods of preparing such organometallic compounds.

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