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Polished-piece holder and manufacturing method thereof
   
Document Number
US Patent 6686023
Issued Date
February 3, 2004
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Abstract
A polished-piece holder is provided that does not easily stick or adsorb to a polishing pad of a polishing apparatus and reduces occurrences of production line troubles and therefore the number of failed polished pieces. A single sheet of a thermosetting resin impregnated fiber substrate or a laminated sheet formed by laminating a plurality of sheets of the thermosetting resin impregnated fiber substrate is formed under heat and pressure into a plate. The thermosetting resin impregnated fiber plate is then processed to form a polished-piece holder for holding pieces to be polished. The evaluation portion has a certain length in a direction of the average line. The thermosetting resin impregnated fiber plate has a surface roughness with a maximum wave height Ry of 10 .mu.m or greater over an almost entire area of the surface layer. The maximum wave height Ry is determined in an evaluation portion of a wave curve by summing a height Rp of a highest crest and a depth Rv of a deepest trough from an average line of the wave curve. The wave curve is taken from a cross-sectional curve obtained by the surface roughness measuring device.
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Number of Claims:
5
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Published
February 3, 2004
Application Number
10/082,683
Filed
February 25, 2002
US Classification
428/141   442/110 442/117 442/148 442/164 442/168 442/169 442/172 442/175 442/180 442/268 442/277 442/278 442/281
Int'l Classification
B29C   70/34   (20060101)   B24B   37/04   (20060101)   B29C   70/04   (20060101)   B32B   1/00   (20060101)  
Examiner
Assistant Examiner
Attorney/Law Firm
Priority Data
Feb 26, 2001 [JP] 2001-049653
USPTO Field of Search
428/141   442/281   442/110   442/117   442/148   442/164   442/168   442/169   442/172   442/175   442/180   442/268   442/277   442/278  
Related Patents
6852003 - Method of manufacturing glass substrate for data recording medium - Owned by Hoya Corporation (JP)

A glass substrate for a data recording medium is manufactured by using a tabular carrier with circular holes formed therein, housing disk-shaped glass workpieces in the circular holes of this carrier, sliding polishing pads over the surface of the carrier and the principal surfaces of the glass workpieces and polishing the glass workpieces until the height (NRa) of micro-waviness on the principal surfaces of the glass workpieces is reduced to a predetermined value or less. The height (NRa) of micro-waviness of the principal surfaces is a value dependent on the surface roughness of the polishing pad and the surface roughness of this polishing pad is a value dependent on the surface roughness of the carrier. A glass substrate for a data recording medium is manufactured by reducing the surface roughness (Ra) of the carrier to 0.08 .mu.m or less and polishing the glass workpieces until the height (NRa) of micro-waviness on the principal surfaces measured using a three-dimensional surface structure analysis microscope whose measuring wavelength (.lambda.) is set to 0.2 to 1.4 mm is reduced to 0.12 nm or less.

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Description
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