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Method to selectively increase the top resistance of the lower programming electrode in a phase-change memory
   
Document Number
US Patent 6696355
Issued Date
February 24, 2004
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Abstract
The present invention relates to a process of forming a phase-change memory. A lower electrode is disposed in a first dielectric film. The lower electrode comprises an upper section and a lower section. The upper section extends beyond the first dielectric film. Resistivity in the upper section is higher than in the lower section. A second dielectric film is disposed over the first dielectric film and has an upper surface that is coplanar with the upper section at an upper surface.
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Number of Claims:
19
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Owner
Ovonyx, Inc. (Boise, ID)
Published
February 24, 2004
Application Number
09/737,363
Filed
December 14, 2000
US Classification
438/597   257/E45.002 438/102 438/675 438/95
Int'l Classification
G11C   16/02   (20060101)   H01L   45/00   (20060101)  
Assistant Examiner
Attorney/Law Firm
USPTO Field of Search
438/466   438/597   438/900   438/675   438/666   438/667   438/668   438/95   438/102   438/666   438/667   438/668   438/666   438/667   438/668   438/637   257/2   257/3   257/4   257/5   257/774  
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