The present invention discloses a cooling apparatus for a linear motor comprising: a `U` shaped stator back iron; a stator having a plurality of permanent magnets installed on inner facing surfaces of the stator back iron; a coil unit positioned between the stator and the permanent magnets with a predetermined gap; a movable unit having a movable unit back iron fixed on the coil unit, the movable back iron having at least one first air hole formed therein in a longitudinal direction and a first air nozzle linked to the first air hole for injecting cooling air from the top portion of the coil unit to the bottom portion; and a frame aligned at the lower portion of the coil unit having a second air hole formed in a longitudinal direction thereof for receiving the cooling air and a second air nozzle linked to the second air hole for injecting the cooling air from the bottom portion of the coil unit to the top portion.
A mover (36) for an exposure apparatus (10) includes a conductor array (358) and a circulation housing (362) that defines at least a portion of a fluid passageway (364) near the conductor array (358). The circulation housing (362) includes a wall (366A) having a wall thickness. In one embodiment, the wall thickness at a first position on the wall (366A) is different than the wall thickness at a second position on the wall (366A). The wall (366A) can be curved and the shape of the curve is different at the first position than at the second position. Further, a cross-sectional shape of the wall (366A) at the first position is different from a cross-sectional shape of the wall (366A) at the second position.
An electromagnetic actuator has a permanent magnet and an armature coil that performs relative movement with respect to the permanent magnet. A material having heat conduction anisotropy surrounds a surface of the armature coil and a heat radiating member radiates heat generated by the armature coil. The heat conduction anisotropic material is oriented to guide the heat generated from the armature coil to the heat radiating member. The actuator may be used in one or more groups of semiconductor substrate exposure apparatuses in a manufacturing factory that performs plural processes using the group of manufacturing apparatuses.
