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Document Number
US Patent 6720223
Issued Date
April 13, 2004
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Abstract
A method of manufacturing a power switching transistor for a fluid ejection device includes forming a diffused drain region and a diffused source region separated by a channel region. The diffused drain region and the diffused source region are doped with a first dopant. A first portion of the diffused drain region is doped with a second dopant, such that the first portion of the diffused drain region has a greater impurity concentration than at least a second portion of the diffused drain region and has a greater impurity concentration than the diffused source region.
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Number of Claims:
8
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Published
April 13, 2004
Application Number
10/135,469
Filed
April 30, 2002
US Classification
438/301   257/E21.427 438/227 438/306
Int'l Classification
H01L   21/02   (20060101)   H01L   21/336   (20060101)  
Examiner
Assistant Examiner
USPTO Field of Search
438/133  
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