The present invention is a cost-effective and compact micro-spectrometer for rapid detection of chemical compounds in the low concentration limit. The invention provides for significantly higher sensitivity compared to conventional spectroscopy techniques (continuous wave and Fourier transform methods) by placing the sample within a high Finesse etalon cavity. An Optical Spectrum Analyzer (OSA) built on either continuous wave (CW-SPEC), or Fourier Transform Absorption Spectroscopy (FT-SPEC) is used to monitor the spectrum from the etalon cavity/sample combination during tuning of the etalon cavity.about.this information is then used to reconstruct the absorption spectrum.
CROSS REFERENCE TO RELATED APPLICATION
This application claims the benefit of U.S. Provisional Patent Application No. 60/300,392, filed Jun. 22, 2001, the content of which is incorporated herein by reference.
An arrangement for building a compact Fourier transform interferometer for optical radiation according to the Michelson principle or a principle derived therefrom. According to the invention, this arrangement is characterized in that the optical modulation of the radiation in at least one of the interferometer arms is produced by the translational displacement of micromechanical translation mirrors that are optically accessible on one side or on both sides, with an effective oscillation amplitude of at least 50 .mu.m and a usable mirror surface area of at least 1 mm.sup.2. In doing so, the micromechanical mirror components according to the invention assume the function of known movable mirrors so that by using an almost massless microcomponent in comparison to conventional systems, a much smaller size and a mirror modulation frequency that is several orders of magnitude higher can be achieved. The arrangement according to the invention is used especially for optical spectroscopy.
An optical apparatus for capturing spectral images includes a variable spectroscopy device having first and second optical members that face each other and have a space therebetween, the spectral characteristics of the variable spectroscopy device being changed in accordance with changes in the relative positions of these optical members; a frame member that fixes the first optical member in place; a driving section disposed between the frame member and the second optical member, and transferring the second optical member with respect to the frame member in accordance with driving signals input to the driving section; and an optical element that deflects or disperses light beams passing through the variable spectroscopy device or a photoelectric conversion element that conducts photoelectric conversion. The optical element or the photoelectric conversion element is supported by the frame member.
