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Method for lithographic processing on molecular monolayer and multilayer thin films
   
Document Number
US Patent 6756296
Issued Date
June 29, 2004
Link
Inventors
Heath; James R. (Santa Monica, CA)
Luo; Yi (Los Angeles, CA)
DeIonno; Erica (Los Angeles, CA)
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Abstract
Methods for making electronic devices where a molecular monolayer or multilayer is sandwiched between top and bottom electrodes at electrode intersections. The molecular layer has an electrical characteristic such as bistable switching. A layer of electrically conductive material is used to protect the molecular layer during formation of the top electrode pattern. The electrically conductive material remains sandwiched between the top and bottom electrodes at the electrode intersections in the final electronic device.
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Number of Claims:
9
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Owner
Published
June 29, 2004
Application Number
10/015,063
Filed
December 11, 2001
US Classification
438/622  
Int'l Classification
H01L   27/28   (20060101)   H01L   51/05   (20060101)   H01L   51/30   (20060101)  
Examiner
Assistant Examiner
USPTO Field of Search
365/151  
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