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Method for fabricating an interconnect line
   
Document Number
US Patent 6767821
Issued Date
July 27, 2004
Link
Inventors
Kumar; Ajay (Sunnyvale, CA)
Wu; Wei-Te (Cupertino, CA)
Lee; Changhun (Cupertino, CA)
Kugimiya; Katsuhisa (Narita-shi, Chiba,JP)
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Abstract
A method of fabricating an interconnect line comprises forming a wall, depositing an etch mask having a thickness that decreases towards a bottom of the wall, and isotropically etching the wall at the bottom to form the interconnect line having a pre-determined gap between the substrate and a bottom of the line.
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Method for fabricating an interconnect line - US Patent 6767821 Drawing
Drawing from US Patent 6767821
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Number of Claims:
29
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Owner
Published
July 27, 2004
Application Number
10/426,354
Filed
April 7, 2003
US Classification
438/619   257/E21.312 257/E21.314 257/E21.582 438/611 438/666 438/669 438/945
Int'l Classification
H01L   21/70   (20060101)   H01L   21/768   (20060101)  
Examiner
Assistant Examiner
USPTO Field of Search
438/52   438/619   438/669  
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The centrifuge has truncated-cone-like separating screen arranged in support basket and held in the bottom thereof by lower flange. Lower flange has notched surface which penetrates into screen. The screen and the basket both have an annular upper edge and an upper flange which is attached to the upper edge of the basket and covers the upper edge of the screen. Finally, the screen is formed by a number of segments attached in pairs by a joint with a T-shaped section.

Claims
Description
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