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Claims  |
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What is claimed is:
1. A digital holographic phase-imaging method comprising the steps of:
generating a digital holographic phase map of an object at a first
wavelength;
generating a digital holographic phase map of the object at a second
wavelength;
subtracting the second phase map from the first phase map;
resolving the fringe number for each pixel phase value;
referencing the digital holographic phase map at the first wavelength
thereby reproducing the image of the object.
2. The method of claim 1, wherein the step of generating a digital
holographic phase map of an object at a first wavelength, further
comprises:
recording a first digital hologram image of the object at the first
wavelength utilizing an object beam and a reference beam;
recording a first digital object image of the object at the first
wavelength utilizing an object beam;
recording a first digital reference image of the object at the first
wavelength utilizing a reference beam; and
subtracting an intensity pattern of the first digital object image and an
intensity pattern of the first digital reference image from the first
digital hologram image resulting in a digital holographic phase map of the
object at the first wavelength.
3. The method of claim 2, wherein an angle between the reference beam and
the object beam is greater than zero, thereby producing an off-axis
hologram.
4. The method of claim 1, wherein the step of generating a digital
holographic phase map of an object at a second wavelength, further
comprises:
recording a second digital hologram image of the object at the second
wavelength utilizing an object beam and a reference beam;
recording a second digital object image of the object at the second
wavelength utilizing an object beam;
recording a second digital reference image of the object at the second
wavelength utilizing a reference beam;
subtracting an intensity pattern of the second digital object image and an
intensity pattern of the second digital reference image from the second
digital hologram image resulting in the digital holographic phase map of
the object at the second wavelength.
5. The method of claim 4, wherein an angle between the reference beam and
the object beam is greater than zero, thereby producing an off-axis
hologram.
6. The method of claim 1, wherein the first wavelength and the second
wavelength are within the visible range.
7. The method of claim 1, wherein the first wavelength and the second
wavelength are within the infrared range.
8. The method of claim 1, wherein the first wavelength is longer than the
second wavelength.
9. The method of claim 1, wherein the second wavelength is longer than the
first wavelength.
10. The method of claim 1, wherein the step of referencing the digital
holographic phase map at the first wavelength, thereby reproducing the
image of the object further comprises, simulating a reference wave at a
first wavelength incident upon the digital holographic phase map.
11. The method of claim 1, wherein the step of resolving the fringe number
for each pixel phase value further comprises:
converting the result of the subtracting step into a plurality of distance
values;
dividing each distance value by the second wavelength;
truncating the result of the dividing step;
multiplying the result of the truncating step by the second wavelength,
resulting in the closest integer wavelength for each pixel value; and
adding the distance value to the closest integer wavelength for each pixel
value.
12. The method of claim 11, further comprising:
adding .pi. to the closest integer wavelength for each pixel value when the
closest integer wavelength value is .pi./2 greater than the distance
value; and
subtracting .pi. from the closest integer wavelength for each pixel value
when the closest integer wavelength value is .pi./2 less than the distance
value.
13. A holographic phase-imaging method comprising the steps of:
recording a first hologram image at a first wavelength;
recording an first object image at a first wavelength;
recording a first reference image at a first wavelength;
generating a first phase map at a first wavelength from the recorded first
hologram image, first object image and first reference image;
recording a second hologram image at a second wavelength, the second
wavelength longer than the first wavelength;
recording a second object image at a second wavelength;
recording a second reference image at a second wavelength;
generating a second phase map at a second wavelength from the recorded
second hologram image, second object image and second reference image;
subtracting the second phase map from the first phase map;
resolving the fringe number for each pixel phase value;
referencing the digital holographic phase map at the first wavelength; and
calculating a topographical map of the object.
14. The method of claim 13, wherein the step of resolving the fringe number
for each pixel phase value further comprises:
converting the result of the subtracting step into a plurality of distance
values;
dividing each distance value by the second wavelength;
truncating the result of the dividing step;
multiplying the result of the truncating step by the second wavelength,
resulting in the closest integer wavelength for each pixel value; and
adding the distance value to the closest integer wavelength for each pixel
value.
15. The method of claim 14, further comprising:
adding .pi. to the closest integer wavelength for each pixel value when the
closest integer wavelength value is .pi./2 greater than the distance
value; and
subtracting .pi. from the closest integer wavelength for each pixel value
when the closest integer wavelength value is .pi./2 less than the distance
value.
16. A digital holographic phase-imaging system comprising:
a digital holographic imager to provide a first hologram image, a first
object image and a first reference image at a first wavelength and a
second hologram image, a second object image and a second reference image
at a second wavelength;
a phase map generator to receive the first hologram image, the first object
image, the first reference image, the second hologram image, the second
object image and the second reference image and to generate a first phase
map comprising a plurality of pixels at a first wavelength and a second
phase map comprising a plurality of pixels at a second wavelength;
a contour generator to determine the fringe number of the plurality of
pixels of the plurality of phase maps; and
a resolution generator to produce sub-wavelength resolution of the object
image.
17. The system of claim 16, wherein the digital holographic imager further
comprises;
a first laser source to illuminate a reference mirror and a target object
to generate the first hologram image, the first object image and the first
reference image at the first wavelength;
a second laser source to illuminate a reference mirror and a target object
to generate the second hologram image, the second object image and the
second reference image at the second wavelength; and
an image capture and storage device to transmit the first hologram image,
the first object image, the first reference image, the second hologram
image, the second reference image and the second object image to the phase
map generator. |
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Claims  |
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Description  |
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BACKGROUND OF INVENTION
Holography is used in a variety of applications ranging from printed
holograms used on credit cards to metrology devices used in integrated
circuit manufacturing. Traditional holography methods involve the
recording on film of phase shifts of the object of interest. These phase
shifts are recorded using two beams of coherent light, an object beam,
which impinges upon the object of interest, and a reference beam. The
interference of the object beam and the reference beam generates phase
patterns, which correlate to physical feature of the object of interest.
Once the image is recorded, an image of the original object can be
regenerated by passing light through the recording film providing a three
dimensional holographic image. A traditional photograph records the
intensity of light reaching a piece of film. A lens is used to record the
image of an object so that each point on the object is focused to a point
on the film. The film records the intensities at each point and we
recognize this as the original object. A hologram is different because it
is capable of recording phase. Since light is a wave, it has the ability
to interfere with itself. Through this interference we can find the phase
of the light. A hologram is made by taking a very coherent light source
and splitting it into two beams. One beam goes straight to the film. This
beam provides a reference of what the laser light looks like and is called
the reference beam. The other beam illuminates the object and is called
the object beam. When this light hits the object, it is reflected off
toward the film. At the film, interference occurs between the electric
fields of the reference beam and the object beam. If the angle between the
reference beam and the object beam is near zero it is called an "on-axis
hologram". If the angle is greater than zero it is called an "off-axis
hologram". In both situations the intensity of the interference is
recorded by the film. This is described by Equations 2.1 and 2.2.
H is the intensity field recorded onto the film, O is the object beam's
electric field, and R is the electric field due to the reference beam.
Unlike a traditional photograph, in holography, what gets recorded onto
the film does not look like the object. The .vertline.O.vertline..sup.2
term is the intensity pattern of the light that came from the object and
.vertline.R.vertline..sup.2 is the intensity of the reference beam. O*R
and OR* are the interference terms and is what we are interested in. To
view the hologram the reference beam must be shined onto the film. The
virtual image appears at the same location as the original object. The
virtual image has depth and can be viewed from different angles just as
the original could. A real image is also formed and can be projected onto
a white card.
The advent of the charged coupled device (CCD) and digital cameras allows
the application of digital technology to the field of holography,
eliminating the need for film recordings. Digital holograms offer some
advantages over prior art film recordings. Reconstruction of the image is
carried out using software thereby permitting more control over the
reconstructed image and time and cost of the hologram are reduced.
However, the prior art digital holograms suffer from what is referred to
as the 2.pi. ambiguity problem. Since the recording only records a phase
shift in a wave, features of the target object greater than one wavelength
are not recorded properly. The phase imaging by digital holography allows
sub-wavelength resolution in microscopic imaging. However for axial ranges
greater than one wavelength the phase image has 2.pi. ambiguity and is
therefore unable to distinguish points that are separated by an axial
distance that is a multiple of the wavelength. Depending upon the
application involved, a wavelength is selected which is sufficiently long
to cover the range required to avoid 2.pi. ambiguity. However, the longer
the wavelength, the lower the resolution.
Phase unwrapping is known in the art as a method to resolve
2.pi.-ambiguity. The simplest form of phase unwrapping is to move along
the phase map until you get to a sudden 2.pi. discontinuity. The program
can identify this sudden jump and add .lambda. to the height of the map to
compensate for the expected discontinuity. At the next discontinuity, the
program adds 2.lambda. to the height map, and so on.
Another phase unwrapping method known in the art is the minimum spanning
tree method. The minimum spanning tree method is an attempt to prevent
spike noise and local inconsistencies from reducing the accuracy of the
overall unwrapped image. The first step of this method is to go from one
pixel to its nearest neighbor with the smallest change in phase. When each
pixel is being considered, neighboring pixels are looked at and used to
try to suppress noise spikes. In the next step, tiles of pixels are made.
The tiles are designed to slightly overlap. The edges are used to compare
each tile to its neighbor. Areas where there are inconsistencies are
avoided so that their errors do not continue for the rest of the map.
All forms of phase unwrapping algorithms make the assumption that the
surface does not have discontinuities more than 2.pi.. If the surface
violates this then the map will not be accurate. This is a problem for
maps that are not well behaved or that have speckle that must first be
removed.
It is known in the art that contours can be generated by using two
different wavelengths to produce a hologram. This procedure is similar to
that of a regular hologram. The difference being that, after the film is
exposed to the object beam and reference beam, it is exposed again with an
object beam and a reference beam of a slightly different wavelength. The
closer together the frequency the further apart the contours are spaced.
It is known in the art to use digital holography to assign accurate,
consistent intensity values to an image and to make it possible to
calculate and extrapolate phase information. The field of digital
holography is relatively new because, until recently, the needed devices
such as a CCD (charge-coupled device) and computers have not been capable
of this task.
There remains a need for a system and method to provide a high-resolution
hologram for objects with surface discontinuities greater than 2.pi. that
eliminates 2.pi. ambiguity.
However, in view of the prior art considered as a whole at the time the
present invention was made, it was not obvious to those of ordinary skill
in the pertinent art how the identified need could be fulfilled.
SUMMARY OF INVENTION
The method in accordance with the present invention resolves the
2.pi.-ambiguity associated with an axial range greater than one wavelength
by a method that employs digital holograms generated with two or more
wavelengths.
The method in accordance with the present invention is a combination of
digital holographic phase mapping and contour generation. The contour
generation is used to determine what fringe number a pixel is on, and the
phase map is then used to produce sub-wavelength resolution. This makes it
possible to get detailed sub-wavelength resolution over several
wavelengths of range without the using phase unwrapping algorithms.
Additionally, since the two-wavelength method of the present invention
still has ambiguities, they are just separated by a much larger distance;
conventional phase unwrapping methods are still applicable. If the
assumption that the surface does not have discontinuities greater than
.lambda. is reasonable, then the assumption that the surface does not have
discontinuities greater then 10.lambda. is reasonable.
In accordance with the present invention, a digital holographic
phase-imaging method to resolve ambiguities includes generating a digital
holographic phase map of an object at a first wavelength, generating a
digital holographic phase map of the object at a second wavelength,
subtracting the second phase map from the first phase map, resolving the
fringe number for each pixel phase value, and referencing the digital
holographic phase map at the first wavelength thereby reproducing the
image of the object. It is also within the scope of the present invention
to employ the method of the present invention utilizing more than two
wavelengths.
In an embodiment of the present invention, the step of generating a digital
holographic phase map of an object at a first wavelength, includes
recording a first digital hologram image of the object at the first
wavelength utilizing an object beam and a reference beam, recording a
first digital object image of the object at the first wavelength utilizing
an object beam, recording a first digital reference image of the object at
the first wavelength utilizing a reference beam, and subtracting an
intensity pattern of the first digital object image and an intensity
pattern of the first digital reference image from the first digital
hologram image resulting in a digital holographic phase map of the object
at the first wavelength. And, recording a second digital hologram image of
the object at the second wavelength utilizing an object beam and a
reference beam, recording a second digital object image of the object at
the second wavelength utilizing an object beam, recording a second digital
reference image of the object at the second wavelength utilizing a
reference beam, subtracting an intensity pattern of the second digital
object image and an intensity pattern of the second digital reference
image from the second digital hologram image resulting in the digital
holographic phase map of the object at the second wavelength.
In a specific embodiment, the angle between the reference beam and the
object beam at the first and second wavelengths is greater than zero,
thereby producing an off-axis hologram. Additionally, the first wavelength
and the second wavelength can be within the visible range or the infrared
range, while additional wavelengths are within the scope of the invention.
The referencing the digital holographic phase map at the first wavelength,
thereby reproducing the image of the object as presented by the present
invention, includes simulating a reference wave at a first wavelength
incident upon the digital holographic phase map.
Additionally, resolving the fringe number for each pixel phase value
includes converting the result of the subtracting step into a plurality of
distance values, dividing each distance value by the second wavelength,
truncating the result of the dividing step, multiplying the result of the
truncating step by the second wavelength, resulting in the closest integer
wavelength for each pixel value, and adding the high resolution distance
value to the closest integer wavelength for each pixel value. At this
point, the method includes adding .pi. to the closest integer wavelength
for each pixel value when the closest integer wavelength value is .pi./2
greater than the distance value, and subtracting .pi. from the closest
integer wavelength for each pixel value when the closest integer
wavelength value is .pi./2 less than the distance value.
In an additional embodiment of the present invention, a method is provide
for recording a first hologram image at a first wavelength, recording an
first object image at a first wavelength, recording a first reference
image at a first wavelength, generating a first phase map at a first
wavelength from the recorded first hologram image, first object image and
first reference image, recording a second hologram image at a second
wavelength, the second wavelength longer than the first wavelength,
recording a second object image at a second wavelength, recording a second
reference image at a second wavelength, generating a second phase map at a
second wavelength from the recorded second hologram image, second object
image and second reference image, subtracting the second phase map from
the first phase map, resolving the fringe number for each pixel phase
value, referencing the digital holographic phase map at the first
wavelength, calculating a topographical map of the object.
In accordance with the present invention, a digital holographic
phase-imaging system is provided, to include a digital holographic imager
to provide a first hologram image, a first object image and a first
reference image at a first wavelength and a second hologram image, a
second object image and a second reference image at a second wavelength, a
phase map generator to receive the first hologram image, the first object
image, the first reference image, the second hologram image, the second
object image and the second reference image and to generate a first phase
map comprising a plurality of pixels at a first wavelength and a second
phase map comprising a plurality of pixels at a second wavelength, a
contour generator to determine the fringe number of the plurality of
pixels of the plurality of phase maps, and a resolution generator to
produce sub-wavelength resolution of the object image.
The digital holographic imager of the present invention further including a
first laser source to illuminate a reference mirror and a target object to
generate the first hologram image, the first object image and the first
reference image at the first wavelength, a second laser source to
illuminate a reference mirror and a target object to generate the second
hologram image, the second object image and the second reference image at
the second wavelength, and an image capture and storage device to transmit
the first hologram image, the first object image, the first reference
image, the second hologram image, the second reference image and the
second object image to the phase map generator.
In accordance with the present invention, multiple phase maps are generated
through the use of digital holography and analyzed using a software
program. By using two different wavelengths to generate phase maps, the
2.pi. ambiguity can be resolved without the use of phase unwrapping
algorithms.
In a specific embodiment of the present invention, a method of holography
using a Michelson interferometer with the reference mirror tilted off axis
is provided. The hologram is recorded using a monochromatic digital
camera. Through the use of Huygens' wavelet principle and fast Fourier
transforms the original object is reproduced not only in intensity but
also in phase. It is the reproduction of the phase maps that allows the
topographical contours to be generated.
Once the phase maps have been obtained using digital holography, the
two-phase maps are subtracted from each other giving a beat wavelength.
The beat wavelength will be longer and can be used to resolve the fringe
number that a pixel's phase value is on, resolving the 2.pi. ambiguities.
The shortest wavelength phase map is then referenced to generate high,
sub-wavelength resolution. In this way, a topographic map can be produced
which has a resolution of 10 nm over several wavelengths with no
ambiguities.
BRIEF DESCRIPTION OF THE DRAWINGS
For a fuller understanding of the nature and objects of the invention,
reference should be made to the following detailed description, taken in
connection with the accompanying drawings, in which:
FIG. 1 Illustrates a phase plot vs. distance for arbitrary wavelength.
FIG. 2 Illustrates a phase vs. distance plot for a significantly longer
wavelength.
FIG. 3 Illustrates a phase vs. distance plot for two slightly different
wavelengths.
FIG. 4 Illustrates a phase vs. distance plot for two slightly different
wavelengths.
FIG. 5 Illustrates equations 2.1 to 2.12 as referenced in the
specification.
FIG. 6 Illustrates a diagrammatic view of the setup of the two laser system
in accordance with the present invention using a Nd:YAG and a HeNe laser.
FIG. 7 Illustrates a flow diagram of the holography method in accordance
with the present invention.
FIG. 8 Illustrates a flow diagram of the fringe determination in accordance
with the present invention.
FIG. 9 Illustrates a wiring diagram for the phase subtraction program in
accordance with the invention.
FIG. 10 Illustrates a wiring diagram for the one dimensional simulation
program in accordance with the invention.
FIG. 11 Illustrates a wiring diagram for the two dimensional simulation
program in accordance with the invention.
FIG. 12 Illustrates a wiring diagram for the program that generates phase
maps from simulated objects in accordance with the present invention.
FIG. 13 Illustrates the phase maps for 500 nm and 600 nm wavelengths.
FIG. 14 Illustrates a graph of a plot of phase difference vs. distance.
FIG. 15 Illustrates a set of graphs wherein the top graph is original line,
middle graph is a reproduction with errors at fringes, and bottom graph is
final reproduction.
FIG. 16 Illustrates the phase plots of smiles face for 532 nm wavelength
and 632 nm wavelength.
FIG. 17 Illustrates the original smiley face object and recreated object.
FIG. 18 Is an illustrative figure obtained using a Nd:YAG for
.lambda..sub.1 =532.00 nm and a HeNe for .lambda.2=632.80 nm.
FIG. 19 Is an illustrative figure obtained using a Nd:YAG for
.lambda..sub.1 =532.00 nm and a HeNe for .lambda.2=632.80 nm.
FIG. 20 Is an illustrative figure obtained using a Nd:YAG for
.lambda..sub.1 =532.00 nm and a HeNe for .pi.2=632.80 nm.
FIG. 21 Illustrates equations 7.1 to 7.5 as referenced in the
specification.
FIG. 22 Is an illustrative figure obtained using a Nd:YAG for
.lambda..sub.1 =532.00 nm and a HeNe for .lambda.2=632.80 nm.
FIG. 23 Is an illustrative diagram of sphere used to calculate radius of
curvature of mirror.
FIG. 24 Illustrates the result in accordance with the present invention
when a sphere of a 120 cm radius is subtracted from the recreation of the
mirror.
FIG. 25 Illustrates two slices of the result when a cure of 120 cm radius
is subtracted from the recreated mirror surface.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT
According to the present invention, holograms are produced off-axis,
wherein the angle between the reference beam and the object beam is
greater than zero. The angle of separation between the reference beam and
object beam is chosen in such a way as to make the hologram appear just
separated from the zero order diffraction. Off-axis holograms are employed
so that .vertline.O.vertline..sup.2 and .vertline.R.vertline..sup.2
patterns do not strongly influence the hologram during reconstruction. In
on-axis holography, .vertline.O.vertline..sup.2 and
.vertline.R.vertline..sup.2 fall on top of the hologram and can completely
mask the image. The off-axis geometry is also chosen because it spatially
separates the virtual image from the real image. One appears to the left
of the zero order diffraction and the other to the right. In on-axis
holography, the virtual image and real image are both at the location of
the zero order diffraction. While .vertline.O.vertline..sup.2 and
.vertline.R.vertline..sup.2 can be subtracted off from the recorded image,
the virtual image cannot. The use of off-axis geometry has the added
benefit of reducing intermodulation noise. Intermodulation noise is
created from interference of different parts of the object wave with other
parts of the object wave. If the object is small and far away, the spatial
frequency of this noise should be lower than that of the interference of
the object wave with the reference. This means that the intermodulation
noise will be more aligned with the zero order diffraction than the
desired holographic image. The angle of separation between the reference
beam and the object beam is kept small so that the spatial frequency of
the interference does not exceed the pixel separations in the camera which
could cause aliasing, another undesired effect due to lack of pixels.
Once H is recorded, .vertline.O.vertline..sup.2 and
.vertline.R.vertline..sup.2, the intensity patterns of the object and
reference beams, are subtracted off. They are recorded separately by
taking a picture of .vertline.O.vertline..sup.2 with the reference beam
blocked and then taking a picture of .vertline.R.vertline..sup.2 with the
object beam blocked. We do this to eliminate the zero-order diffraction
completely. This leaves us with only the cross terms. One represents a
real image, and the other represents the virtual image.
The final hologram, which consists of only the cross terms, is what gets
saved to a file. The original image is reproduced by simulating a
reference wave hitting the recorded hologram. Huygens' wavelet theory is
used to reproduce the electric field resulting from a coherent plane wave
striking the hologram. Each point is allowed to emit a complex wave, which
has an amplitude proportional to the intensity value of that recorded
pixel. In this way, the resultant complex electric field can be calculated
at any arbitrary plane. Reproducing the original object requires
calculating the electric field at the position that the original object
was recorded.
In Equation 2.3, E(x, y; z) is the electric field at any arbitrary point.
E.sub.0 (x.sub.0, y.sub.0) is the electric field at a point on the
hologram. Distance from one point in the hologram plane to a point in the
image plane is r and wave number is k.
Since the electric field is complex, the choice can be made to view only
the phase factor of the electric field. By viewing the phase factor
information about the height of the object's surface is identified. FIG. 1
shows how phase and the z distance are related. Sub-wavelength detail can
be generated directly from the phase map. Notice, however, that the phase
rises to 2.pi. and then repeats. For a given phase there exists many
different possible z distances which could have generated it. This means
that if it is desired to have full detail about the object, it has to have
no features that extend past .lambda.. Therefore, a longer wavelength is
used to examine a larger object. The problem here is that for a given
uncertainty in phase, the uncertainty in distance goes up as .lambda. goes
up, as shown in FIG. 2.
If both a short wavelength and a long wavelength are used, it is possible
to examine a larger object and still have high resolution. The object
would first be imaged with the long wavelength; this would provide a range
of the object's position in space. Then image with the short wavelength to
get higher resolution. The idea is to use the longer wavelength to resolve
the degeneracies of the shorter wavelength. The longer wavelength is used
to give information about which 2.pi. repetition the object point is on.
This requires that the uncertainty in distance given by the longer
wavelength be less than the shorter wavelength.
If the first wavelength is in the visible range of the spectrum, then the
second must be significantly longer, in the infrared. Instead of using an
infrared laser, the longer wavelength can be simulated by using a
difference of wavelengths. Two phase plots could be made using
.lambda..sub.1 and .lambda..sub.2 with one subtracted from the other to
produce a beat wavelength. This way, instead of using two very different
wavelengths, two visible wavelengths that are close together can be used.
FIG. 3 shows the two phase plots simultaneously. FIG. 4 shows the same as
FIG. 3 with a line added showing a subtraction of the two wavelengths.
The graph of the wavelength subtraction appears to be discontinuous at
first, but if all the negative phases are raised by 2.pi., a continuous
linear graph results. This graph is described by Equation 2.4, where m is
the slope, x is the axial distance, and .phi. is the phase difference.
The resultant slope, in radians per nanometer, is given by Equation 2.5
wherein .lambda..sub.1 is the longer of the wavelengths, and
.lambda..sub.2 the shorter. As mentioned above, the uncertainty in
distance of the beat wavelength must be no more than .lambda..sub.2. Using
the equation for a straight line for the graph of the longer wavelength
results in Equation 2.6 where .DELTA..phi. is the uncertainty in phase
expressed in radians. Then solving for the maximum allowed uncertainty in
phase is as provided in Equation 2.7. The result is the uncertainty in
phase of the beat wavelength. Since the beat wavelength was produced by
subtraction of two other wavelengths, this phase uncertainty is the sum of
the two wavelengths' uncertainties. If the two wavelengths are close and
the uncertainties are the same, Equation 2.8 is used where
.DELTA..phi..sub.s is the phase uncertainty of each wavelength. The
maximum scan distance achievable is given by the beat wavelength, x.sub.r,
the distance at which the beat phase map repeats as provided in Equation
2.9. The last two relations can be used to get a new equation relating the
maximum achievable scan distance to a given phase uncertainty (Equation
2.10). The resolution of the system is given by the short wavelength's
phase map (Equation 2.11). The repeat distance is determined by the
separation of the two wavelengths. No matter how much noise is in the
system, the beat wavelength is what determines the scan range of the
system. There is a limit, however, to how long the beat wavelength can be.
If the beat wavelength is too long, then the uncertainty in distance will
be greater than the single frequency wavelength, causing the system to
inaccurately determine the fringe number.
Using Equation (2.10), an x.sub.r can be calculated to be about 20 .mu.m,
which sets the maximum scan distance due to the system's noise
limitations. Rearranging Equation (2.9) determines what the second
frequency should be to achieve this scan distance (Equation 2.12).
According to one embodiment of the present invention, using this equation,
it is determined that .lambda..sub.1 should be 653.5 nm. If a wavelength
shorter than 653.5 nm is used, the program will no longer be able to
determine what fringe number a point is on. This will cause the surface to
have erratic discontinuities. If a wavelength longer than the calculated
653.5 nm is used, the scan range will be shorter but the program will
still be able to determine which fringe number a point is on. This will
allow the program to read the single wavelength phase map and produce the
10 nm resolution.
The following system and method embodiments are exemplary and as such are
not intended to limit the scope of the invention.
An exemplary embodiment in accordance with the present invention is
provided as shown in FIG. 6. In this embodiment, the two frequency sources
chosen were an HeNe laser 10 at 632.8 nm and a frequency doubled Nd:YAG
Coherent DPSS 532 laser 15 . The HeNe laser is first attenuated using an
OD 0.8 attenuator 20. It is then steered toward a beam splitter 30 using a
mirror 25. At the beam splitter it is combined with the Nd:YAG laser beam.
Before the Nd:YAG laser comes to the beam splitter it is attenuated by OD
3.6 attenuator 35. It is then reflected off a steering mirror 40 toward
the beam splitter 30. Once the beams are properly aligned with each other
they pass through a filter wheel ranging from OD 0.04 to OD 2.5. The
purpose of the filter wheel is to make it easy to change the overall
intensity of the system for use on targets with different reflectivity.
The combined beam line passes through a spatial filter 50 to clean up the
beam profile. The beam is then collimated using a 20 cm achromatic lens
55. The collimated beam is sized using a circular aperture 60 of about 7
mm in diameter. This beam is then sent through a cube beam splitter 65
which separates the beam into reference and object beams. The reference is
filtered to make the intensity of the object beam and reference beam
roughly equal. The reference beam mirror 70 is given a slight tilt
off-axis. The object beam is sent through a 5 mm.times.2 mm rectangular
aperture 75. The beams recombine through the beam splitter and are sent
through a calibrated, transparent window 80 used as the image screen. It
has hash marks on it used for measuring the size of the visible screen. A
10 cm achromatic lens 85 is set up in front of a CCD camera 90 at a
distance of 15 cm. The camera is set to focus at infinity. The combination
of setting the camera to focus at infinity and the ten centimeter lens
makes the camera focus on the transparent window. The camera signal is
sent through a connector 95 to an image acquisition card 100. The images
are all recorded as bitmaps to avoid compression errors.
Thick neutral density filters are used because thin neutral density filters
cause noticeable interference patterns to form in the beam. These
interference patterns cause errors in the calculation of phase. The
filters are also all turned slightly off normal to prevent back reflection
from entering the system. The cube beam splitter is also chosen over a
wedged plate beam splitter because the wedged plate beam splitter produces
some interference patterns. The cube, despite being coated with a first
order antireflection coating, exhibits back reflections and is tilted
slightly down. There is a beam block 105 placed a few centimeters away
from the camera lens. It was found that most of the stray reflections
focused around this point. These stray reflections are blocked without
blocking the object and reference beams.
In an exemplary embodiment in accordance with the method of the present,
with reference to FIG. 7 and FIG. 8, the HeNe laser and YAG laser are
turned on and allowed to warm up for about 20 minutes. The HeNe beam is
first completely blocked and a hologram is taken using only the YAG 110.
The object to be imaged is put into position and aligned. The images are
recorded. This first image is the hologram H, wherein both object and
reference beams are from the YAG. Next, the reference beam is blocked.
This image recorded is the object, .vertline.O.vertline..sup.2 115. Then
the object beam is blocked and only the reference,
.vertline.R.vertline..sup.2, is recorded 120. Once these three images are
recorded, the program takes the first image and subtracts off the second
and third 125. This fmal image is the recorded hologram. A program is then
run to reproduce the original object. The user provides the program the
distance of the object 135. The program starts from the recorded hologram
and uses Huygens' wavelet principle to propagate the electric field. The
electric field is allowed to propagate mathematically until it reaches a
distance equal to that of the object distance. The program does this for
all points in the hologram plane to all points in the object plane 140.
In accordance with an exemplary setup embodiment of the present invention,
the area of the object that is illuminated is 5 mm.times.2 mm. The capture
area on the camera is set to 5 mm.times.5 mm to allow for the off-axis
hologram. The 5 mm.times.2 mm rectangle is placed so that it is on the
left side of the screen. The final projected image is calculated into a 5
mm.times.5 mm area. When zero tilt angle is entered into the program, the
zero order diffraction appears on the screen in the same location as the
original 5 mm.times.2 mm aperture. The holographic image appears to the
right of the zero order diffraction.
The program allows the user to view the intensity, the phase, and the real
and imaginary parts of the reproduced object. The program can also change
the angle of the plane at which the object is recreated. This is
equivalent to viewing the object from a different angle. This is a very
useful feature for flat objects because the off-axis hologram reproduces
the image as having a horizontal tilt equal to the angle of the reference
mirror. This would generate phase maps that exceed the repeat distance and
cause wrap around. The angle is selected so that the phase maps have the
least number of fringes. This can also compensate for any tilt the object
may have originally had. The phase map is then saved for later use 145.
The YAG beam is now blocked and the HeNe beam is unblocked. The first
image is the hologram H, wherein both object and reference beams are from
the YAG 150. Next, the reference beam is blocked. This image recorded is
the object, .vertline.O.vertline..sup.2 155. Then the object beam is
blocked and only the reference, .vertline.R.vertline..sup.2, is recorded
160. Once these three images are recorded, the program takes the first
image and subtracts off the second and third 165. This final image is the
recorded hologram. A program is then run to reproduce the original object
170. The user provides the program the distance of the object 175. The
program starts from the recorded hologram and uses Huygens' wavelet
principle to propagate the electric field. The electric field is allowed
to propagate mathematically until it reaches a distance equal to that of
the object distance. The program does this for all points in the hologram
plane to all points in the object plane 180. Once again, we save the phase
map produced with the second laser 185.
With reference to FIG. 8, now that the phase maps are saved, a second
program is initiated 187. This program allows the user to select two files
and input the wavelengths at which these files were recorded. From this,
the second program is able to calculate a topographical map of the
original object 190. The program needs object size, distance, number of
pixels used, and wavelength at which the hologram was recorded to be
entered by the user. The program allows absolute value, phase, real, and
imaginary parts of the reconstruction to be viewed. The second program,
does the actual phase subtractions and calculations. Refer to FIG. 21 for
a wire diagram of this program. The first step in the program is to
subtract the two phase maps from each other 195. Then the subtraction is
modulo 2.pi.. The next step converts the phase subtraction into distance
200 using the equations described above in Equation (2.4). The program
gives a visual output at this point but it does not have the resolution
that a single frequency phase plot would have because the noise in the
original phase plot is amplified here. The next part of the program takes
each point's height and divides by .lambda..sub.2 205. The result is then
truncated 210 and multiplied by .lambda..sub.2 215. This brings the height
value down to the closest integer wavelength. The next step adds to the
height an additional amount indicated by the original single frequency
phase map 220. The original phase map contains high resolution distance
information and we use the subtraction to find out which fringe the point
is on 225. There is a problem, however, when a point lies on the edge of a
fringe. The random noise of the system can push the point to the next
fringe. This results in the point suddenly jumping by .lambda. in height.
A simple "if" statement 230 checks to see if the point has made a change
greater than .lambda./2 from the phase subtraction. If it has, it is
reduced by exactly .lambda. 235. A second "if" 240 statement checks to see
if the point has reduced by more than .lambda./2. If it has, the height
value of the point is | | |