A vacuum pump (1) includes a housing (2) in which a suction inlet opening (5) is defined. A vibration absorber (7) includes a suspension body (8) and an absorber jacket (9). The housing (2) of the vacuum pump (1) is connected directly to one end of the suspension body (8) in vacuum-tight connection and an opposite end of the suspension body carries a connecting port (14). By connecting the suspension body directly with the housing without mechanically releasable interconnection elements, the overall height of the pump and suspension body assembly is reduced.
A damper mechanism for isolating vibrations from a vacuum pump constructed and adapted for coupling to a vacuum chamber, the damper mechanism including an elastomeric material, preferably an elastomer diaphragm, coupled between the pump and the vacuum chamber so as to permit the pump to move in six degrees of freedom, while transferring minimum force to the chamber.
