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Double acting cold trap
   
Document Number
US Patent 6814812
Issued Date
November 9, 2004
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Inventors
Jian; Zhang (Singapore,SG)
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Abstract
A double acting cold trap equipped with a set of exhaust gas condensing fins and a set of exhaust gas condensing plates is disclosed. The invention also discloses a double acting cold trap that incorporates a deflecting plate to direct the exhaust gases over the condensing fins and plates in a serial fashion. This increases the efficiency of the collection of unwanted particles.
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Number of Claims:
10
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Published
November 9, 2004
Application Number
10/339,204
Filed
January 9, 2003
US Classification
118/715   62/55.5
Int'l Classification
C23C   16/44   (20060101)  
Examiner
Parent Case
This is a division of patent application Ser. No. 10/053,332, filing date Jan. 18, 2002 now U.S. Pat. No. 6,528,420, Double Acting Cold Trap, assigned to the same assignee as the present invention.
USPTO Field of Search
118/715   62/55.5   55/434.2  
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